 The BH2-60HD is a heavy
duty roughing pump package providing pump down to the 10-5 torr range. It
combines a 16 cfm molecular drag pump, with zero maintenance ceramic bearings, and an
industrial diaphragm pump with Teflon coated diaphragms, in a modular package.
The BH2-60D is ideally suited for vacuum chamber volumes up to 60 liters
and:
Roughing ion pumped systems:
Starting ion pumps in systems roughed to the low 10-5 torr
range extends cathode life. The BH2-60HD provides low roughing pressure without problem of
oil backstreaming.
Backing turbomolecular pumps:
Since the BH2-60HD contains no oil, there is no need to vent a turbopump on
system shut down. Lower backing pressure extends the useful pumping speed of the turbo and
results in lower base pressure.
- Roughing cryopumped systems:
The BH2-60HD eliminates the possibility of oil contaminating the cryopump charcoal array
during pumpdown after regeneration.
Buy Now-On-Line Store Link for the BH2-60HD
BH2-60HD Manual
BH2-60HD
Specifications |
| Molecular Drag Pump |
ISO 63 inlet flange, 16 cfm inlet
speed, zero maintenance |
| System Blank-off Pressure |
<1 x 10-5 torr |
| Diaphragm Pump |
Two stage, Teflon coated
diaphragms |
| Valve sequencing |
Fully automatic and interlocked |
| Pressure sensor and circuit to
control drag pump operation. |
|
| Maximum Overall Dimensions |
8.38" W x 15.125" D x
13.25" H |
| Warranty |
Two Year |
|
Turbo
60G