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Vacuum Equipment
- Oil Free Pumping
Packages |
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| Drivac, Inc.
provides oil-free pump packages for clean roughing pump requirements and high vacuum
pumping of small chambers. These easy-to-use rugged packages have many satisfied repeat
customers. Demo units for field testing are available from our office. Contact Schoonover, Inc. to schedule an evaluation.
Dri-2 Series
Turbo Series
Other Products and Services
Selection Guide for Oil-Free Pump Packages
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 Drivac
DRI-2 Series |
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| BH2-60HD |
 The BH2-60HD is a heavy
duty roughing pump package providing pumpdown to the 10-5 torr range. It
combines a 16 cfm molecular drag pump, with zero maintenance ceramic bearings, and an
industrial diaphragm pump with Teflon coated diaphragms, in a modular package.
The BH2-60D is ideally suited for vacuum chamber volumes up to 60 liters
and:
Roughing ion pumped systems:
Starting ion pumps in systems roughed to the low 10-5 torr
range extends cathode life. The BH2-60HD provides low roughing pressure without problem of
oil backstreaming.
Backing turbomolecular pumps:
Since the BH2-60HD contains no oil, there is no need to vent a turbopump on
system shut down. Lower backing pressure extends the useful pumping speed of the turbo and
results in lower base pressure.
- Roughing cryopumped systems:
The BH2-60HD eliminates the possibility of oil contaminating the cryopump charcoal array
during pumpdown after regeneration.
BH2-60HD
Specifications |
| Molecular Drag Pump |
ISO 63 inlet flange, 16 cfm inlet
speed, zero maintenance |
| System Blank-off Pressure |
<1 x 10-5 torr |
| Diaphragm Pump |
Two stage, Teflon coated
diaphragms |
| Valve sequencing |
Fully automatic and interlocked |
| Pressure sensor and circuit to
control drag pump operation. |
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| Maximum Overall Dimensions |
8.38" W x 15.125" D x
13.25" H |
| Warranty |
Two Year |
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| RS-200
A complete component oil-free roughing pump system for user installation. Includes a 16
CFM molecular drag pump, heavy duty diaphragm pump, power supply and controller, foreline
valve and pressure switch assembly, and all vacuum fittings and cables. Mechanical
installation in 10 minutes, electrical hookup in five minutes. Blank-off pressure = 10-6
torr range. |
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Drivac TURBO SERIES |
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| Compact, air-cooled, oil-free
portable turbopump packages. |
Turbo 60E
 The
Turbo 60E is an oil-free turbo pump package providing pumpdown to
the low 10-7 torr range. Combines a 60 l/s hybrid turbopump, and an industrial
diaphragm pump with Teflon coated diaphragms, in a modular package. Ideally suited for
vacuum chamber volumes up to 60 liters. Requires no venting on shutdown or in power
failure situations. |
Turbo
60E Specifications |
| Hybrid Turbomolecular Pump |
60 l/s inlet speed, ISO 63 or
4.5" ConFlat inlet flange |
| System Blank-off Pressure |
1 x 10-7 torr. |
| Diaphragm Pump |
Two stage, Teflon coated
diaphragms |
| Valve sequencing |
Fully automatic and interlocked |
| Pressure sensor and circuit to
control drag pump operation. |
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| Maximum Overall Dimensions |
Approximately: 8.38" W x
15.125" D x 13.25" H. |
| Warranty |
One Year |
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| TURBO 100 - Similar to the
Turbo 60E, but with a 100 l/s hybrid turbomolecular pump. |
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Other
Drivac( previously known as HOVAC ) Products and Services |
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| Stand alone mechanical
diaphragm pump pump packages with base, auto vent, stainless steel inlet fittings: |
| H-60 |
Two stage air-cooled oil-free
diaphragm pump, ultimate pressure is 4 torr, pumping speed is 0.8 CFM 3/8" OD
stainless tube or NW-16 inlet connection. 115 VAC. (230 VAC version also available). |
| MD 4 |
Three-stage, air-cooled oil-free
diaphragm pump, ultimate pressure is 1.5 torr, pumping speed is 2.1 CFM.. NW-16 inlet
flange. 115 VAC. (230 VAC version also available). |
| H-200 |
Heavy duty two-stage, air-cooled,
oil-free diaphragm pump, ultimate pressure is 1.5 torr, pumping speed is 2.8 CFM. 115 VAC. |
Inlet flange adapters available for conversion of ISO 63 inlet flanges to NW-25,
NW-40, or NW-50 ISO flanges, 2.75" ConFlat, or 1 or 1.5 " hose connections.Exchange
program for Alcatel turbo and mechanical drag pumps.
Repairs and upgrades of Alcatel and Balzers turbo and drag pump products. |
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Selection guide for HOVAC Oil-Free Pump Packages |
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Model |
Pump
Type(1) |
Inlet
Flange Size |
Pumping
Speed |
Pressure
Range(2) |
Maximum
Chamber Volume |
Roughing
Pump Packages |
BH2-60HD |
MDP/2D |
ISO-63 |
16 cfm |
<10-5
torr |
60 liters |
BH2-200 |
MDP/3D |
ISO-63 |
16 cfm |
<10-5
torr |
200 liters |
RS-200 |
MDP/2D |
ISO-63 |
16 cfm |
<10-5
torr |
200 liters |
High
Vacuum Packages |
Turbo
60E |
HTP/2D |
ISO-63 |
60 l/s |
<10-7
torr |
60 liters |
Turbo
100 |
HTP/2D |
ISO-63
4.5 CF |
105 l/s
105 l/s |
<10-7
torr
<10-7 torr |
60 liters
60 liters |
Diaphragm
Pump Packages |
H-60 |
2D |
3/8"
tube(3) |
0.8 cfm |
4 torr |
60 liters |
MD 4 |
3D |
NW-16 |
2.1 cfm |
1.5 torr |
200 liters |
H-200 |
2D |
NW-16 |
2.8 cfm |
1.5 torr |
200 liters |
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| (1) |
MDP = Molecular Drag Pump |
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2D = Two-stage Diaphragm Pump |
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3D = Three-stage Diaphragm Pump |
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HTP = Hybrid Turbomolecular Pump |
| (2) |
Practical working pressure, not
ultimate blank-off pressure |
| (3) |
NW-16 flange connection optional |
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