The BH2-60HD is a heavy
duty roughing pump package providing pump down to the 10-5 torr range. It
combines a 16 cfm molecular drag pump, with zero maintenance ceramic bearings, and an
industrial diaphragm pump with Teflon coated diaphragms, in a modular package.
The BH2-60D is ideally suited for vacuum chamber volumes up to 60 liters
Roughing ion pumped systems:
Starting ion pumps in systems roughed to the low 10-5 torr
range extends cathode life. The BH2-60HD provides low roughing pressure without problem of
Backing turbomolecular pumps:
Since the BH2-60HD contains no oil, there is no need to vent a turbopump on
system shut down. Lower backing pressure extends the useful pumping speed of the turbo and
results in lower base pressure.
- Roughing cryopumped systems:
The BH2-60HD eliminates the possibility of oil contaminating the cryopump charcoal array
during pumpdown after regeneration.
Buy Now-On-Line Store Link for the BH2-60HD
|Molecular Drag Pump
||ISO 63 inlet flange, 16 cfm inlet
speed, zero maintenance
|System Blank-off Pressure
||<1 x 10-5 torr
||Two stage, Teflon coated
||Fully automatic and interlocked
|Pressure sensor and circuit to
control drag pump operation.
|Maximum Overall Dimensions
||8.38" W x 15.125" D x