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Diffusion Pump OEM Heater Chart |
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Scroll Down for the Various Models of
Heaters |
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Heater Replacement Guide:
VARIAN / NRC |
|
PUMP
SIZE
|
PUMP
MODEL
|
Heaters
per Pump
|
Electrical Rating
|
VARIAN/NRC
HEATER NO.
|
DALTON
PART NO.
|
HEATER
TYPE
|
|
WATTS
|
VOLTS
|
|
2"
|
HSA
|
1
|
350W
|
120V
|
0181-6473-01-100
|
W5C030-0117
|
CARTR.
|
|
2"
|
HS-2
|
1
|
450W
|
120V
|
0181-6473-02-125
|
W5C033-0118
|
CARTR.
|
|
2"
|
M-2
|
1
|
450W
|
120V
|
0181-6472-03-120
|
4/512-2/9D
|
PLATEN
|
|
4"
|
H4X,
VHS-4
|
1
|
1450W
|
120V
|
0181-6473-04-205
|
1512-4/9D
|
PLATEN
|
|
4"
|
H4X,
VHS-4
|
1
|
1450W
|
208V
|
0181-6473-210
|
1521-4/9D
|
PLATEN
|
|
4"
|
H4X,
VHS-4
|
1
|
1450W
|
240V
|
0181-6473-04-250
|
1524-4/9D
|
PLATEN
|
|
4"
|
M-4,
NHS-4
|
1
|
1190W
|
120
|
0181-6473-04-100
|
1212-4/9D
|
PLATEN
|
|
4"
|
M-4,
NHS-4
|
1
|
1190W
|
240
|
0181-6473-04-200
|
1224-4/9D
|
PLATEN
|
|
4"
|
VARIOUS
|
1
|
AS REQUIRED
|
--
|
CUSTOM 4/9D
|
PLATEN
|
|
4"
|
HS4/0161
|
1
|
1000W
|
120V
|
0181-6473-04-004
|
1012-5/D
|
PLATEN
|
|
4"
|
VARIOUS
|
1
|
AS REQUIRED
|
--
|
CUSTOM 5D
|
PLATEN
|
|
6"
|
VHS-6,
VS250
|
1
|
2200W
|
120V
|
0181-6473-06-125
|
2212-6D
|
PLATEN
|
|
6"
|
VHS-6,
VHS250
|
1
|
2200W
|
208V
|
0181-6473-06-175
|
2221-6D
|
PLATEN
|
|
6"
|
VHS-6,
VHS250
|
1
|
2200W
|
240V
|
0181-6473-06-225
|
2224-6D
|
PLATEN
|
|
6"
|
VHS-6,
VHS250
|
1
|
2200W
|
480V
|
NOT LISTED
|
2248-6D
|
PLATEN
|
|
6"
|
M-6,
NHS-6
|
1
|
1785W
|
120V
|
0181-6473-06-100
|
1812-6D
|
PLATEN
|
|
6"
|
M-6,
NHS-6
|
1
|
1500W
|
208V
|
0181-6473-06-150
|
1521-6D
|
PLATEN
|
|
6"
|
M-6,
NHS-6
|
1
|
1785W
|
240V
|
0181-6473-06-200
|
1824-6D
|
PLATEN
|
|
6"
|
VARIOUS
|
1
|
AS REQUIRED
|
|
CUSTOM 6D
|
PLATEN
|
|
6"
|
HS6/0162
|
1
|
1800W
|
120V
|
0181-6473-01-005
|
1812-7D
|
PLATEN
|
|
6"
|
HS6/0162
|
1
|
1800W
|
240V
|
0181-6473-01-006
|
1824-7D
|
PLATEN
|
|
6"
|
VARIOUS
|
1
|
AS REQUIRED
|
|
CUSTOM 7D
|
PLATEN
|
|
10"
|
HS-10
|
1
|
3900W
|
208V
|
NOT LISTED
|
3921-11D
|
PLATEN
|
|
10"
|
HS-10
|
1
|
3900W
|
240V
|
NOT LISTED
|
3924-11D
|
PLATEN
|
|
10"
|
HS-10
|
1
|
3900W
|
480V
|
NOT LISTED
|
3948-11D
|
PLATEN
|
|
10"
|
HS-10
|
1
|
3300W
|
480V
|
0180-6473-10-230
|
3348-11D
|
PLATEN
|
|
10"
|
VARIOUS
|
1
|
AS REQUIRED
|
|
CUSTOM-11D
|
PLATEN
|
|
10"
|
VHS-10, VHS400
|
1
|
5000W
|
208V
|
NOT LISTED
|
5021-12D
|
PLATEN
|
|
10"
|
VHS-10, VHS400
|
1
|
5000W
|
240V
|
NOT LISTED
|
5024-12D
|
PLATEN
|
|
10"
|
VHS-10, VHS400
|
1
|
5000W
|
480V
|
NOT LISTED
|
5048-12D
|
PLATEN
|
|
10"
|
VHS-10, VHS400
|
1
|
4400W
|
208V
|
0181-6473-10-140 (x2)
|
4421-12D
|
PLATEN
|
|
10"
|
VHS-10, VHS400
|
1
|
4400W
|
240V
|
0181-6473-10-150 (x2)
|
4424-12D
|
PLATEN
|
|
10"
|
VHS-10, VHS400
|
1
|
4400W
|
480V
|
0181-6473-10-170 (x2)
|
4448-12D
|
PLATEN
|
|
10"
|
VARIOUS
|
1
|
AS REQUIRED
|
|
CUSTOM 12D
|
PLATEN
|
|
16"
|
HS-16
|
3
|
3200W
|
240V
|
NOT LISTED
|
3224-8R
|
PLATEN
|
|
16"
|
HS-16
|
3
|
3200W
|
480V
|
NOT LISTED
|
3248-8R
|
PLATEN
|
|
16"
|
HS-16
|
3
|
2700W
|
240V
|
0181-6473-16-035
|
2724-8R
|
PLATEN
|
|
16"
|
HS-16
|
3
|
2700W
|
480V
|
0181-6473-16-045
|
2748-8R
|
PLATEN
|
|
16"
|
VARIOUS
|
3
|
AS REQUIRED
|
|
CUSTOM 8R
|
PLATEN
|
|
20"
|
HS-20
|
6
|
2400W
|
240V
|
NOT LISTED
|
2424-10R
|
PLATEN
|
|
20"
|
HS-20
|
6
|
2400W
|
480V
|
NOT LISTED
|
2448-10R
|
PLATEN
|
|
20"
|
HS-20
|
6
|
2000W
|
240V
|
0181-6473-20-060
|
2024-10R
|
PLATEN
|
|
20"
|
HS-20
|
6
|
2000W
|
480V
|
0181-6473-20-070
|
2048-10R
|
PLATEN
|
|
20"
|
HS-20
|
6
|
AS REQUIRED
|
|
CUSTOM 10R
|
PLATEN
|
|
32"
|
HS-32
|
6
|
4000W
|
240V
|
0181-6473-32-075
|
4024-14R
|
PLATEN
|
|
32"
|
HS-32
|
6
|
4000W
|
480V
|
0181-6473-32-075
|
4048-14R
|
PLATEN
|
|
32"
|
VARIOUS
|
6
|
AS REQUIRED
|
|
CUSTOM 14R
|
PLATEN
|
|
35"
|
NHS-35
|
6
|
4000W
|
240V
|
0181-6472-35-248
|
4024-16/8R
|
PLATEN
|
|
35"
|
NHS-35
|
6
|
4000W
|
480V
|
0181-6472-35-248
|
4048-16/8R
|
PLATEN
|
|
35"
|
VARIOUS
|
6
|
AS REQUIRED
|
|
CUSTOM16/8R
|
PLATEN
|
|
|
Heater Replacement Guide:
Leybold Vacuum Diffusion Pumps |
|
PUMP
SIZE
|
PUMP
MODEL
|
Heaters
per Pump
|
Electrical Rating
|
LEYBOLD
PART NO.
|
DALTON
PART NO.
|
HEATER
TYPE
|
|
WATTS
|
VOLTS
|
|
10"
|
DIP 3 000
|
2
|
1250W
|
230V
|
200 05 457
|
D9C200-2762
|
CARTRIDGE
|
|
16"
|
DIP 8 000
|
6
|
800W
|
230V
|
200 05 458
|
D9C200-2761
|
CARTRIDGE
|
|
20"
|
DIP 12 000
|
9
|
800W
|
230V
|
200 05 458
|
D9C200-2761
|
CARTRIDGE
|
|
26"
|
DIP 20 000
|
12
|
1000W
|
230V
|
200 05 459
|
D9C200-2760
|
CARTRIDGE
|
|
32"
|
DIP 30 000
|
18
|
1000W
|
230V
|
200 05 459
|
D9C200-2760
|
CARTRIDGE
|
|
39"
|
DIP 50 000
|
24
|
1000W
|
230V
|
200 05 459
|
D9C200-2760
|
CARTRIDGE
|
|
|
Heater Replacement Guide:
EDWARDS HIGH VACUUM |
|
PUMP
SIZE
|
PUMP
MODEL
|
Heaters
per Pump
|
Electrical Rating
|
EDWARDS HEATER NO.
|
DALTON
PART NO.
|
HEATER
TYPE
|
|
WATTS
|
VOLTS
|
|
4"
|
SI100
|
1
|
250W
|
120V
|
|
D5C067-2563
|
CARTRIDGE
|
|
4"
|
E04
|
1
|
850W
|
120V
|
H017-00-140
|
8/512-4D
|
PLATEN
|
|
4"
|
E04
|
1
|
850W
|
240V
|
H017-00-137
|
8/524-4D
|
PLATEN
|
|
6"
|
E06
|
1
|
1350W
|
120V
|
H017-00-59 & 102
|
1412-4/9D
|
PLATEN
|
|
6"
|
E06
|
1
|
1350W
|
240V
|
H017-00-54 & 113
|
1424-4/9D
|
PLATEN
|
|
9"
|
E09
|
1
|
2250W
|
120V
|
H017-00-161 & 132
|
2312-6/9D
|
PLATEN
|
|
9"
|
E09
|
1
|
2250W
|
240V
|
H017-00-158 & 137
|
2324-6/9D
|
PLATEN
|
|
10"
|
HT10
|
3
|
1700W
|
220V
|
26906-016
|
1722-6DE
|
PLATEN
|
|
10"
|
HT10
|
3
|
1700W
|
460V
|
26906-013
|
1746-6DE
|
PLATEN
|
|
12"
|
E012
|
3
|
1600W
|
120V
|
H017-00-181 & 102
|
1612-6E
|
PLATEN
|
|
12"
|
E012
|
3
|
1600W
|
240V
|
H017-00-179 & 113
|
1624-6E
|
PLATEN
|
|
16"
|
HT16
|
6
|
1500W
|
220V
|
26906-023
|
1522-6DE
|
PLATEN
|
|
16"
|
HT16
|
6
|
1500W
|
460V
|
26906-019
|
1546-6DE
|
PLATEN
|
|
18"
|
18B4
|
3
|
2000W
|
220V
|
26906-026
|
2022-6DE
|
PLATEN
|
|
18"
|
18B4
|
3
|
2000W
|
460V
|
26906-030
|
2046-6DE
|
PLATEN
|
|
20"
|
HT20
|
6
|
2100W
|
220V
|
26906-033
|
2122-10RE
|
PLATEN
|
|
20"
|
HT20
|
6
|
2100W
|
460V
|
26906-037
|
2146-10RE
|
PLATEN
|
|
|
Heater Replacement Guide:
VEECO Vacuum Diffusion Pumps |
|
PUMP
SIZE
|
PUMP
MODEL
|
Heaters
per Pump
|
Electrical Rating
|
VEECO
HEATER NO.
|
DALTON
PART NO.
|
HEATER
TYPE
|
|
WATTS
|
VOLTS
|
|
3"
|
300 Series
|
1
|
350W
|
115V
|
1180-030-00
|
3/512-3/3D
|
PLATEN
|
|
6"
|
7700 Series
|
1
|
1800W
|
208V
|
1180-220-00
|
1821-6D
|
PLATEN
|
|
6"
|
7760 Series
|
1
|
1800W
|
208V
|
1180-220-00
|
1821-6D
|
PLATEN
|
|
10"
|
747 Series
|
1
|
1800W
|
208V
|
1180-220-00
|
1821-6D
|
PLATEN
|
|
|
Heater Replacement Guide:
CVC Products |
|
PUMP
SIZE
|
PUMP
MODEL
|
Heaters
per Pump
|
Electrical Rating
|
CVC PRODUCTS
PART NO.
|
DALTON
PART NO.
|
HEATER
TYPE
|
|
WATTS
|
VOLTS
|
|
2"
|
PMC-2
|
1
|
300W
|
115V
|
65192
|
W3C040-0111
|
CARTRIDGE
|
|
2"
|
PMC-2
|
1
|
300W
|
208V
|
65192-2
|
W3C040-0110
|
CARTRIDGE
|
|
2"
|
PMC-2
|
1
|
300W
|
230V
|
65192-1
|
W3C040-0113
|
CARTRIDGE
|
|
2"
|
KS-200
|
1
|
500W
|
115V
|
51832
|
W4C044-0115
|
CARTRIDGE
|
|
4"
|
PMC-4
|
4
|
300W
|
115V
|
65192
|
W3C040-0111
|
CARTRIDGE
|
|
4"
|
PMC-4
|
4
|
300W
|
208V
|
65192-2
|
W3C040-0110
|
CARTRIDGE
|
|
4"
|
PMC-4
|
4
|
300W
|
230V
|
65192-1
|
W3C040-0113
|
CARTRIDGE
|
|
6"
|
PMC-6
|
6
|
300W
|
115V
|
65192
|
W3C040-0111
|
CARTRIDGE
|
|
6"
|
PMC-6
|
6
|
300W
|
208V
|
65192-2
|
W3C040-0110
|
CARTRIDGE
|
|
6"
|
PMC-6
|
6
|
300W
|
230V
|
65192-1
|
W3C040-0113
|
CARTRIDGE
|
|
6"
|
PVMS-10
|
1
|
2200W
|
230V
|
285801-2
|
2223-6/5D
|
PLATEN
|
|
10"
|
PMC-10
|
18
|
250W
|
208V
|
270819-0002
|
W3C034-0114
|
CARTRIDGE
|
|
10"
|
PMC-10
|
18
|
250W
|
230V
|
270819
|
W3C034-0112
|
CARTRIDGE
|
|
10"
|
PVMS-11, -12
|
1
|
5000W
|
230V
|
281463-1
|
5023-10/9D
|
PLATEN
|
|
10"
|
PVMS-11, -12
|
1
|
5000W
|
460V
|
281463-2
|
5046-10/9D
|
PLATEN
|
|
16"
|
PVM-16
|
6
|
1600W
|
230V
|
281760-2
|
1623-8/2R
|
PLATEN
|
|
20"
|
PVM-20
|
36
|
350W
|
115V
|
5507892-0001
|
3/512-2/9D
|
PLATEN
|
|
20"
|
PMC-20C
|
INNER
|
4310W
|
230V
|
269933-1
|
4323-12/3RI
|
RING
|
|
20"
|
PMC-20C
|
INNER
|
4310W
|
460V
|
269933-3/5
|
4346-12/3RI
|
RING
|
|
20"
|
PMC-20C
|
OUTER
|
6690W
|
230V
|
269933-2
|
6723-17/7RI
|
RING
|
|
20"
|
PMC-20C
|
OUTER
|
6690W
|
460V
|
269933-4/6
|
6746-17/7RI
|
RING
|
|
32"
|
PVM-32
|
30
|
750W
|
115V
|
279503-0001
|
7/512 -4/9D
|
PLATEN
|
|
32"
|
PVM-32
|
30
|
750W
|
230V
|
279503-0002
|
7/523 -4/9D
|
PLATEN
|
|
35", 48"
|
PMC-32C, -48C
|
INNER
|
8930W
|
230V
|
269217-5
|
8923-23/9RI
|
RING
|
|
35", 48"
|
PMC-32C, -48C
|
INNER
|
8930W
|
460V
|
269217-1/3
|
8946-23/9RI
|
RING
|
|
35", 48"
|
PMC-32C, -48C
|
OUTER
|
11350W
|
230V
|
269217-6
|
11423-29/8RI
|
RING
|
|
35", 48"
|
PMC-32C, -48C
|
OUTER
|
11350W
|
460V
|
269217-2/4
|
11446-29/8RI
|
RING
|
|
ALL SIZES
|
VARIOUS
|
ALL TYPE
|
AS REQUIRED
|
|
CUSTOM
|
ALL TYPES
|
|
|
|
