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Vacuum Equipment |
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MASS FLOW METERS |
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M
Series Laminar Mass Flow Meter
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Alicat Scientific Mass Flow Controllers
Mass flow
meters, regardless of manufacturer, serve a
single purpose...to measure the flow of gasses
through a system. Mass flow meters must be
accurate, versatile, dependable
and cost effective.
The Alicat Scientific's M series mass flow
meter was designed to meet and exceed the
requirements that customers place on mass flow
meters:
Simplicity
Alicat M series mass flow meters were designed
to be used as a stand-alone device. With the
native display a user can easily change the
configuration of the meter without the need for
computers, complicated software or scripts.
Accuracy
Alicat M series mass flow meters compensate for
changes in process temperature and pressure.
Reduced Cost of Ownership
Alicat M series and V series flow meters require
very little power to run thereby reducing
operating costs. M and V series flow instruments
also have less pressure drop when compared to
similar flow devices. Reduced pressure drop
means more process fluids go into your
process and not into you measurement devices.
The M series mass flow meters also measure
pressure, temperature and volumetric flow in
addition to mass flow which means less
additional instruments you will have to buy and
install.
Versatility
M series mass flow meters are available in any
flow range from 0.5SCCM through 1500SLPM. They
are equipped with multiple analog outputs.
Adding a
totalizer allows users to see how much media
has flowed through the system making it a great
way to monitor usage and indentify waste. The M
series meter can also be equipped with an Alicat
9V battery pack to make a
stand alone calibration and flow verification
device.
Speed
With a response time of under 10 milliseconds
Alicat mass flow meters respond more than twice
as fast as your eye can blink.
Small Size
The M series mass flow meter has a footprint of
2.37"X1.050" through 4.00"X1.60" making it easy
to integrate into systems or to use as as a
stand-alone calibrator.
Repeatablity
Alicat's patented technology allows its mass
flow meters to have very few moving parts. All
of the internal components are fixed in place
resulting in very little physical change inside
the mass flow meter. Little physical change in
the flow cavity means higher rates of
consistency and repeatablity.
Dependablity
There are currently over 22,000 Alicat
products in service around the world. Alicat
mass flow meter are being used in processes like
leak detection, flow monitoring and atmospheric
testing.
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Features and Benefits of Alicat M series
mass flow meters
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Measured Parameters
Mass Flow
Volumetric Flow
Pressure (PSIA)
Temperature (ฐ Celsius) |
All measured parameters are displayed in real time on
the
digital display Any measured parameter ban be
brought to the center of the screen. Remote displays are
also available. |
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Versatility
Multiple process measurements in one device to
reduce the need for other measurement devices.
Response speed can be adjusted by the user to suit
the application
Multiple digital & analog Inputs/Outputs to make
communicating with the device less costly.
100:1 Turndown ratio allows the unit to measure
flow at 1/100th of its full scale rating
16-Gas Select on all units reduces inventory
requirements
"Tare" feature allows the user to zero the unit at
any time
Customizable units of measure for added ease of
use
Optional
Remote Display allows for panel mount of the display
with full pushbutton control in embedded applications |
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30
factory installed, user selectable, gas calibrations:
Air
Argon
Methane
Carbon Monoxide
Carbon Dioxide
Ethane
Hydrogen
Helium
Nitrogen
Nitrous Oxide
Neon
Oxygen
Propane
Butane
Acetylene
Ethylene
Iso-Butane
Krypton
Xenon
Sulfur Hexaflouride
75% Argon + 25% C02
90% Argon + 10% C02
92% Argon + 8% C02
98% Argon + 2% C02
75% Argon + 25% Helium
75% Helium + 25% Argon
75% CO2 + 25% Argon
Helistarฎ A1025
Stargonฎ CS |
Click here for an interactive demostration of
Alicat's mass flow meter's display fucntionality.
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Communication
RS-232 output of all measured parameters
RS-232 input for gas select
0-5Vdc output of main parameter
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Customization
Alternate STPs for mass units
Lower pressure drops cut material costs
0-10Vdc or 4-20mA outputs; 2 channels
Totalization
Gas blend calibrations
Alternate Units of Measure (SCFM, etc)
Battery pack for portable operation
Locking 6-pin electrical connection
No Display Units for OEMs
Bi-directional Flow |
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Mass Flow Meter and Volumetric Flow Meter
Literature
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Operating Manual |
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| Product Specification |
| 0.5SCCM
to 50SCCM Full Scale |
| 50+
SCCM to 20SLPM Full Scale |
| 20+
SLPM to 250SLPM Full Scale |
| 250+
SLPM to 1000SLPM Full Scale |
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| Mechanical Drawing |
| 0.5SCCM
to 50SCCM Full Scale |
| 50+
SCCM to 20SLPM Full Scal |
| 20+
SLPM to 50SLPM Full Scale |
| 50+SLPM
to 100SLPM Full Scale |
| 100+SLPM
to 250SLPM Full Scale |
| 250+SLPM
to 1500 SLPM Full Scale |
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3D Model vacuum
coating, vacuum metalizing, sputtering, e-beam
evaporation, controlling gas flow in vacuum, vacuum
pressure control, physical vapor deposition, PVD, CVD,
plasma, vacuum coater, MKS 1179A, Unit Mass Flow
Controller, brooks instruments, Kurt Lesker, Lesker,
celerity, sierra, hastings mass flow controller, sierra
mass flow controller, MKS Instruments mass flow
controller, omega, cole palmer, metalization vacuum
Alicat Scientific is a
replacement MFC for Aalborg, Brooks Instruments, Unit
Instruments, Clerity and MKS Instruments. The Alicat
Scientic MFC cannot be purchased at Kurt Lesker or
Duniway Stockroom. The Alicat Mass Flow Controller
provides more features and is less expensive than MKS
Instruments Mass Flow Controllers. |
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