Schoonover, Inc. - Vacuum Equipment

Vacuum Equipment

MASS FLOW CONTROLLERS

MC & MCR Series Laminar Mass Flow Controller Products

VC & VCR Series Laminar Volumetric Flow Controller Products

Alicat Scientific Mass Flow Controllers

0.5 sccm 1.0 sccm 2 sccm 5 sccm 10 sccm 20 sccm 50 scccm 100 sccm 200 sccm

500 sccm 1 slm 5 slm 10 slm 2 20 slm 50 slm 100 slm 250 slm 500 slm 1000 slm

1500 slmmetalizing, sputterinoration, controlling gas flow in vacuum, vacuum pressure control, physical vapor

Mass flow controllers (MFCs) were originally designed to take the guess work out of precision gas flow control. Today, the demand for accurate and repeatable gas flow control has spanned dozens of industries. Demand for mass flow controllers is growing and customers are requiring that MFCs are easy to use, fast, reliable, accurate, cost effective and robust.

The Alicat Scientific Mass Flow Controllers are especially well suited for vacuum coating applications. These would include vacuum sputtering, e-beam evaporation, or chemical vapor deposition(CVD). We can do secondary outputs for pressure or temperature should you also need to monitor inline pressure.

The Alicat MC series mass flow controller is designed to meet the above requirements:

Simplicity
The MC series mass flow controller is very easy to use. With the local display users can make changes to the configuration of the unit without the need for computers, complicated software or scripts.

Accuracy
Alicat MC series mass flow controllers compensate for changes in process temperature and pressure.

Repeatablity
Alicat's patented technology allow its mass flow controllers to have very few moving parts. All of the internal components are fixed in place resulting in very little physical change inside the MFC. Little physical change in the flow cavity means higher rates of consistency and repeatablity.

Reduced Cost of Ownership
Alicat MC series and VC series flow controllers require very little power to run thereby reducing operating costs. MC and VC series flow controllers also have less pressure drop when compared to similar flow devices. Reduced pressure drop means more process fluids go into your process and not into you measurement devices. The MC series mass flow controllers also measure pressure, temperature and volumetric flow in addition to mass flow which means less additional instruments you will have to buy and install.

Speed
The Alicat MC series mass flow controller has a response time of less than 10ms and a control time of 100ms making it one of the fastest naturally responding mass flow controllers on the market today. Click here to see a short video of how quickly an Alicat MC series mass flow controller responds to changes.

Versatility
MC series mass flow controllers are available in any flow range from 0.5SCCM through 1500SLPM. They are equipped with multiple analog outputs and inputs. Adding a totalizer allows users to see how much media has flowed through the system, making it a great way to monitor usage and indentify waste.

Dependablity
There are currently over 22,000 Alicat products in service around the world. Alicat mass flow controllers are being used in processes like pharmaceutical and semiconductor manufacturing, fuel cell research, auto paint application, and emissions compliance equipment.

Mass Flow Controller and Volumetric Flow Controller Features

Measured Parameters MC & MCR Series Mass Flow Controller products � Mass Flow � Volumetric Flow � Pressure (PSIA) � Temperature (� Celsius or � Farenheit) VC & VCR Series Volumetric Flow Meter products � Volumetric Flow	All measured parameters are displayed in real time on digital display. Any measured parameter can be selected to the center of the display.

Versatility � Pressure and temperature measurements are taken and displayed in the same unit alleviating the need for additional measurement devices. (MC & MCR Series) � Mass flow controllers can be set by user to control pressure. It's like having 2 instruments in one. (MC & MCR Series) � MFCs can be tuned for application specific control � Multiple digital & analog inputs and outputs � 100:1 Turndown ratio � 16-Gas Select on all units to reduce inventory costs � Control range from 1% to 100% of full scale flow � Tunable P & D to fine tune instrument's speed of response � Optional Remote Display allows for panel mount of the display with full pushbutton control in embedded application

30 factory installed, user selectable, gas calibrations: � Air � Argon � Methane � Carbon Monoxide � Carbon Dioxide � Ethane � Hydrogen � Helium � Nitrogen � Nitrous Oxide � Neon � Oxygen � Propane � Butane � Acetylene � Ethylene � Iso-Butane � Krypton � Xenon � Sulfur Hexaflouride � 75% Argon + 25% C02 � 90% Argon + 10% C02 � 92% Argon + 8% C02 � 98% Argon + 2% C02 � 75% Argon + 25% Helium � 75% Helium + 25% Argon � 75% CO2 + 25% Argon � Helistar� A1025 � Stargon� CS

Communication
    � RS-232 output of all measured parameters
        (RS-485 available)
    � 0-5Vdc output of main parameter
    � Local Setpoint
    � RS-232 Setpoint
    � 0-5Vdc Setpoint

Customization
    � Alternate STPs for gas units
    � Lower pressure drops
    � Totalization
    � Gas blend calibrations
    � Alternate Units of Measure (SCFM, Kg/M, etc)
    � Downstream valve for vacuum applications
    � Locking 6-pin electrical connection
    � No Display Units for OEMs
    � 0-10 volt DC output
    � 4-20mA current output
    � Bi-directional flow
    � Alarm drivers

3D Model vacuum coating, vacuum metalizing, sputtering,

Alicat Scientific Mass Flow Controllers and Mass Flow Meters are great for hydrogen fuel cell, automotive leak detection, leak detection, gas flow, nitrogen purge, sparging and automation applications. Other applications where precise gas flow is needed or precise pressure control is required are applicable.

The Alicat Mass Flow Controller outputs and inputs allow the user to replace other mass flow controllers and mass flow meters such as MKS, Brooks, Celerity, Unit, Sierra and Hastings

Mass Flow Controller and Volumetric Flow Controller Literature

Operating Manual

Product Specifications

0.5 to< 50sccm Full Scale

50 sccm to <20slm Full Scale

20 slm to 250 slm Full Scale

250 slm to 1500 slm Full Scale

Mechanical Drawings

0.5 sccm to 50 sccm FS

50 sccm to < 20 slm FS

20 slm to 100 slm FS

100 slm to 1500 slm FS