Understanding Specifications
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What does all it mean?
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When you are looking at a spec sheet for
mass flow meters and mass flow controllers the amount of
information presented can be a little overwhelming.
Especially, if you are not familiar with what all of the
terminology means or if you are not sure which of the specs
will have the most impact on what you are trying to
accomplish.
Listed below are some of the more important mass flow meter
and mass flow controller specs and what they mean in plain
english. |
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| Accuracy |
Accuracy is a mesurement of how accurately
an instrument performs at different flow ranges
Accuracy is generally measured in one of two ways:
percentage of full scale flow or percentage of reading.
Error as a percentage of full scale is established by
multiplying the error percentage by the full scale flow. The
less you flow through the device the less accurate the
reading will be. For that reason, you don't want to get a
larger device than you need. Devices with error expressed
as a percentage of full scale are most accurate when flowing
at full scale.
Error expressed as a percentage of reading expresses error
as a percentage of what the device is actually flowing.
Simply, if a instrument's accuracy is rated to +/-1% of
reading an instrument will be accurate to +/-1% of whatever
the instrument is flowing. At 100SLPM the instrument will be
accurate to within +/-1SLPM, and at 10SLPM of flow the unit
will be accurate to within +/-.1SLPM.
Accuracy, regardless of measurement method, is generally
dependant on operating conditions. Operating conditions
are usually defined as the pressure and temperature of the
gas flowing through the instrument. Manufacturers will rate
their instrument's error based on some predefined set of
operating conditions, usually standard pressure and
temperature. So, if your gas temperature and/or gas pressure
do not meet those conditions specified by the manufacturer
the accuracy of your unit could be off by quite a bit. Some
units, like Alicat's, are
internally compensated which means that sensors inside
the device measure temperature and pressure conditions and
make real time corrections for variations in gas conditions.
Real time corrections for variations in gas conditions
take a lot of worry about maintaining consistent process
conditions.
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| Repeatability |
Repeatability measures an instrument's
ability to repeat flow functions accurately.
A unit's repeatability is generally measured by monitoring a
flow instrument's reading at a given flow rate, turning off
the flow allowing instrument to return to zero for a given
period of time, and then resuming the same flow. The
instrument's repeatability is determined by examining the
difference between the original flow reading and the flow
reading after the flow has been turned off and resumed.
Simply, repeatability measures how repeatable an
instrument's reading will be at the same flow rate. |
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| Turndown Ratio |
| The turndown ratio of a flow instrument,
such as a
mass flow meter or
MFC, is the ratio of minimum flow to full scale flow.
Simply put, it is the minimum amount of fluid that can be
measured by the device. For example, if a given flow meter
or MFC has a 100:1 turndown ratio the flow meter or MFC is
capable of measuring 1/100 of the full scale flow. So,
suppose this flow meter or MFC has a full scale rating of
100SLPM the flow meter or MFC will measure down to 1SLPM of
flow. It is very important to remember that a mass flow
meter or a mass flow controller has a rated accuracy based
in whole, or in part, on the full scale flow of the unit.
So, even though said flow meter or MFC can flow to 1/100 of
it's full scale range you want to make absolutely certain
that the accuracy at those low flow rates meet your
requirements. |
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| Warm up time |
| Warm up time measures the amount of time it
takes for an instrument to become stable for use.
Thermal units tend to have the longest warm up times.
Some units can take up to 30 minutes to become stable
to within 2%FS. This is an important specification if you
turn your unit off at the end of the day. |
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| Pressure Drop |
Pressure drop describes the loss of
pressure as a fluid travels through a pipe or channel. If
you blew into a mile long pipe, it's unlikely that anything
would come out the other end. This is due to pressure drop.
As the fluid flows through the pipe, friction with the pipe
walls and between the fluid particles causes a loss of
pressure. Pressure drop is approximately proportional to the
distance the fluid travels. Every component that a gas comes
in contact with, every fitting, every pipe wall, every bend,
etc. there is pressure drop.
Since pressure drop is a flow killer, you most likely want
to make sure that every component in your system generates
as little pressure drop as possible. |
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| Zero Shift or Offset error |
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Zero shift or offset shift is defined as how far from
zero an instrument will move when pressure and/or
temperature are changed. Offset error does not affect the
slope of the calibration curve, any offset error will be the
same throughout the flow range. Offset error is measured in
%FS (or %reading)/degree change in temp (or psi change in
pressure) Simply, for every change in degree temp or change
in psi the calibration is offset by the percentage of error.
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| Span Shift or Span Error |
Span shift or span error is defined as a shift in the
slope of the calibration curve with zero not changing. The
calibration curve of the device will be affected differently
at different flow ranges. Span error is measured in %FS (or
%reading)/degree change in temp (or psi change in pressure)
Simply, for every change in degree temp or change in psi the
calibration is offset by the percentage of error
Zero shift or span shift can also be referred to as
"Temperature coefficients" or "Pressure Coefficients" and
will be measured the same way. Be sure to pay attention to
the units of measure as some manufacturers will measure span
or offset error percentages by measuring in degrees F or
single psi instead of degrees C or atm's of pressure. |
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| Dead Band |
Dead band is defined as an area of a signal range or
band where no action occurs. Put simply, the band where the
system is dead.
Dead band as it relates to a pressure switch is the band in
between which the switch trips (the setpoint) and where the
switch resets. |