Ordering Information
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SQM-160 |
2-Channel Thin Film Rate/Thickness Monitor |
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502-020 |
4-Channel Option Card (expands SQM-160 to 6 QCM input channels)
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A complete system consists of a monitor, feedthrough, sensor, and
sensor kit. A sensor kit contains a standard oscillator, a 10-pack
of crystals, and the cables required to connect everything
together. An example of a basic typical system might include the
following: |
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SQM-160 |
2-Channel Thin Film Rate/Thickness Monitor |
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930-000 |
Feedthrough, 1 inch bolt, one electrical and two cooling lines
3/16" |
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932-000 |
Single standard sensor, with 1/8" cooling lines |
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934-003 |
Sensor kit, includes one 900-010 oscillator, one 934-000 10-pack
of gold crystals, one 902-011 6inch ( 150mm) BNC cable, one 902-012
10ft (3m) BNC cable, and one 902-014 30" (0.7m) vacuum cable.
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Refer to the price list for a complete list of models and
configurations available. |
Nor-Cal offers an extensive selection of commonly used
quartz crystal feedthroughs, sensors and multi-channel monitors, cables,
quartz crystals, accessories and replacement parts for use in
semiconductor, optical and industrial thermal deposition processes.
Custom feedthroughs are available with a variety of flanges in all
sizes.
Our coating instrumentation products support one of the more popular
methods of thin film measurement and rate control the crystal monitor,
which utilizes the piezoelectric properties of a quartz crystal.
The electrical characteristics of the crystal, which is held in place
by the sensor, change during deposition. Single sensors are generally
used for short deposition runs, whereas, dual sensors allow for longer
runs. Dual sensors require an airline to operate a pneumatic shutter
which covers one crystal at a time. The sensor is either welded to the
feedthrough or attached with connectors. Most sensors are available with
cooling lines.
The application determines the correct choice of sensor. The sensor
determines compatible feedthroughs and cabling. The chamber determines
the appropriate feedthrough and flange. For application temps up to
150C, electrical connection between the sensor and feedthrough is
accomplished with a vacuum coaxial cable. A bakeable, one piece sensor/feedthrough
replaces the standard in-vac cable with a stainless steel high-temp
coaxial line for high temperature applications up to 300C.
The feedthrough is the air-to-vacuum connection between the sensor
and the oscillator. The feedthrough transfers the quartz crystal's piezo-electric
vibrations to the oscillator via a short coaxial cable. The oscillator
conditions the signals and transfers them to the monitor via another
coaxial cable. The monitor then measures, interprets and displays the
thickness, rate and frequency of deposition. Nor-Cal's thin film
deposition monitors are available with up to six independent channels to
read six single sensors or three dual sensors simultaneously. Each
sensor requires its own cabling and oscillator. Contact our sales staff
for help with your system configuration.
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