Thin Film Deposition Monitor

Thin Film Deposition Monitors

CM-2 and CM-6 Deposition Thickness/ Thin Film Monitor

High Resolution
0.03 Hz at 10 readings/sec
2 QCM measurement channels, 6 optional
2 analog outputs for rate/thickness recording
Display rate, thickness, frequency, or mass
Operate shuttered dual sensors or rate sampling
RS232 interface
Windows setup and data acquisition software included
2 ppm low temperature coefficient oscillator
Low cost

The Nor-Cal CM-2 Deposition Thin Film Monitor (also known as a thickness monitor) provides a low cost and easy to use thin film package for research and development. It is ideal for single layer or multi-layer processes.

Specifications

sensor inputs	2 standard, or 6 optional	recorder outputs	2
frequency range	4.0 to 6.0 MHz	stored films	9
frequency accuracy	0.002% @ 6 MHz	digital inputs	open shutter, close shutter, zero thickness, zero time
frequency resolution	0.06 Hz @ 6 MHz	relay outputs	shutter, thickness setpoint, time setpoint, crystal fail
rate resolution	0.055 /sec	size	88.5 x 212.7 x 196.9 mm 3.5 x 8.4 x 7.75 inches
thickness resolution	0.027 @ 2 readings/sec and 2.7 g/cc density	power	90-140/180-240 VAC 50/60 Hz

Ordering Information

SQM-160	2-Channel Thin Film Rate/Thickness Monitor
502-020	4-Channel Option Card (expands SQM-160 to 6 QCM input channels)

A complete system consists of a monitor, feedthrough, sensor, and sensor kit. A sensor kit contains a standard oscillator, a 10-pack of crystals, and the cables required to connect everything together. An example of a basic typical system might include the following:
SQM-160	2-Channel Thin Film Rate/Thickness Monitor
930-000	Feedthrough, 1 inch bolt, one electrical and two cooling lines 3/16"
932-000	Single standard sensor, with 1/8" cooling lines
934-003	Sensor kit, includes one 900-010 oscillator, one 934-000 10-pack of gold crystals, one 902-011 6inch ( 150mm) BNC cable, one 902-012 10ft (3m) BNC cable, and one 902-014 30" (0.7m) vacuum cable.
Refer to the price list for a complete list of models and configurations available.

Nor-Cal offers an extensive selection of commonly used quartz crystal feedthroughs, sensors and multi-channel monitors, cables, quartz crystals, accessories and replacement parts for use in semiconductor, optical and industrial thermal deposition processes. Custom feedthroughs are available with a variety of flanges in all sizes.

Our coating instrumentation products support one of the more popular methods of thin film measurement and rate control the crystal monitor, which utilizes the piezoelectric properties of a quartz crystal.

The electrical characteristics of the crystal, which is held in place by the sensor, change during deposition. Single sensors are generally used for short deposition runs, whereas, dual sensors allow for longer runs. Dual sensors require an airline to operate a pneumatic shutter which covers one crystal at a time. The sensor is either welded to the feedthrough or attached with connectors. Most sensors are available with cooling lines.

The application determines the correct choice of sensor. The sensor determines compatible feedthroughs and cabling. The chamber determines the appropriate feedthrough and flange. For application temps up to 150C, electrical connection between the sensor and feedthrough is accomplished with a vacuum coaxial cable. A bakeable, one piece sensor/feedthrough replaces the standard in-vac cable with a stainless steel high-temp coaxial line for high temperature applications up to 300C.

The feedthrough is the air-to-vacuum connection between the sensor and the oscillator. The feedthrough transfers the quartz crystal's piezo-electric vibrations to the oscillator via a short coaxial cable. The oscillator conditions the signals and transfers them to the monitor via another coaxial cable. The monitor then measures, interprets and displays the thickness, rate and frequency of deposition. Nor-Cal's thin film deposition monitors are available with up to six independent channels to read six single sensors or three dual sensors simultaneously. Each sensor requires its own cabling and oscillator. Contact our sales staff for help with your system configuration.