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Viewport shutters are normally installed on a vacuum chamber CF flange
behind a viewport. The shutter serves to shield the viewport surface and
prevent the build-up of deposition materials. The shutter plate opens a
full 90 degrees by rotating the supplied all metal rotary motion
feedthrough and may be locked in position with a locking screw.
Features and General Specs:
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- 304 SS flange material
- CF flanges sizes available 2.75" CF -8"
CF
- Maximum bakeout temperature 150 degrees
C
- 10(-10) torr vacuum range
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