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Vacuum Component- Vacuum Hardware - Foreline Traps
UHV Manipulation-
Vacuum Valves |
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Vacuum
Hardware-ISO, ConFlat, ASA, NW
Custom Chambers
Vacuum Valves
UHV Sample Manipulation
Foreline Traps
Custom Weldments
Heater Jackets |
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Schoonover is pleased to be a
Representative and Distributor for Nor-Cal Products. Nor-Cal was one of
the first manufacturers of vacuum hardware and has built its reputation
as the premier supplier of stainless steel vacuum chambers. Located in
Yreka, CA, Nor-Cal's facility is world class with full integrated
manufacturing capability for all aspects of UHV custom chamber
manufacturing. Schoonover
is available to discuss and advise on custom vacuum chambers, UHV
manipulation systems and vacuum hardware questions.
For more information on products, click
on the sections below for additional information.
Nor-Cal's Manufacturing Facility

Products
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Flanges
and Fittings
NW / KF Hardware
ISO Hardware
CF Hardware
Adaptors
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Flexible
Hoses |
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Vacuum
Valves |
Foreline
Traps |

Vacuum Chambers
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EVAC
Metal Seals |
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Sample
Manipulation |
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Vacuum Chambers
We have developed a reputation at national laboratories, universities and UHV equipment
manufacturers for being the premier vacuum chamber fabricator. The quality, appearance and
performance of our chambers are unequaled. Some of the chambers we make include load
locks, sample preparation chambers, analysis chambers, monochrometers, beam line
collimators, reactors and coating chambers. We frequently supply cylindrical and
rectangular chambers with doors, stands and water jackets. Our engineering staff can
design a chamber from customer sketches or specifications and supply complete
manufacturing drawings for customer approval.
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Valves
Our valves are offered with a number of options, making it easy for our customers to
specify non-standard O-rings, actuators, fittings and air solenoids. We also provide
customer specified valves with special port configurations, pumpouts, materials and other
features. |
Weld Fittings
Because we manufacture tees, elbows and other weld fittings in-house, Nor-Cal can
fabricate exhaust weldments for semiconductor equipment from a single piece of tubing.
Welds and other manufacturing steps are eliminated, improving cleanliness and fit while
reducing cost. We have demonstrated as much as 30% savings to our customers using this
technique.
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Vacuum Fittings
NW, ISO, Con-Flat, metal seal, ASA vacuum fittings. Includes adaptors,
flanges, seals and clamps. |
Traps
We have years of experience designing and building custom foreline traps to protect pumps
and eliminate buildup of condensable by-products in forelines and exhaust lines. Examples
of these include water-cooled and particle traps for LPCVD, PECVD, metal CVD, MOCVD and
metal etch. Others are particle traps for crystal growers, liquid traps for reclamation of
photo resist and oil reclamation traps for industrial applications. Often times our
customers see a 200% increase in preventative maintenance intervals after installing one
of these traps. |
Thermal Products
The experience gained designing heaters for our standard products has allowed us to
provide thermal products for special applications. We have drawn from a number of heating
technologies (silicon, fiberglass, cartridge, strip, band, tubular and thick film) in
order to provide the most cost-effective solutions. Examples include heated traps,
internal heaters for vacuum chambers, gas delivery systems and ion pump heaters.
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System Integration
On request, Nor-Cal can assemble an entire system including chamber, frame, pumps, gauges,
valves, manipulators and other components to customer specifications. Our vacuum
technicians can complete a thorough qualification of system performance, including time to
base pressure and RGA scan, before the system is back filled with nitrogen and shipped to
the customer. |
Comprehensive Downstream Solutions
Our experience coupled with a broad product offering allows us to integrate components,
providing comprehensive solutions to semiconductor fabs and equipment manufacturers. To
improve overall system performance and achieve customer defined goals, a thorough
evaluation of the system is conducted. A cost of ownership model can be provided showing
payback as a result of increased tool utilization and decreased planned and unplanned
maintenance costs. |
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