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Allprodlogo.jpg (31859 bytes)Vacuum Hardware-ISO, ConFlatŪ, ASA, NW

Custom Chambers

Vacuum Valves

UHV Sample Manipulation

Foreline Traps

Custom Weldments

Heater Jackets

Schoonover is pleased to be a Representative and Distributor for Nor-Cal Products. Nor-Cal was one of the first manufacturers of vacuum hardware and has built its reputation as the premier supplier of stainless steel vacuum chambers. Located in Yreka, CA, Nor-Cal's facility is world class with full integrated manufacturing capability for all aspects of UHV custom chamber manufacturing. Schoonover is available to discuss and advise on custom vacuum chambers, UHV manipulation systems and vacuum hardware questions.

For more information on products, click on the sections below for additional information.

Nor-Cal's Manufacturing Facility

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Products

Flanges and Fittings

NW / KF Hardware

ISO Hardware

CF Hardware

Adaptors

 

 

Flexible Hoses

Vacuum Valves

Foreline Traps

Vacuum Chambers

 

 

 

EVAC Metal Seals

Sample Manipulation

 
   

Vacuum Chambers
We have developed a reputation at national laboratories, universities and UHV equipment manufacturers for being the premier vacuum chamber fabricator. The quality, appearance and performance of our chambers are unequaled. Some of the chambers we make include load locks, sample preparation chambers, analysis chambers, monochrometers, beam line collimators, reactors and coating chambers. We frequently supply cylindrical and rectangular chambers with doors, stands and water jackets. Our engineering staff can design a chamber from customer sketches or specifications and supply complete manufacturing drawings for customer approval.

Valves
Our valves are offered with a number of options, making it easy for our customers to specify non-standard O-rings, actuators, fittings and air solenoids. We also provide customer specified valves with special port configurations, pumpouts, materials and other features.
Weld Fittings
Because we manufacture tees, elbows and other weld fittings in-house, Nor-Cal can fabricate exhaust weldments for semiconductor equipment from a single piece of tubing. Welds and other manufacturing steps are eliminated, improving cleanliness and fit while reducing cost. We have demonstrated as much as 30% savings to our customers using this technique.
Vacuum Fittings
NW, ISO, Con-Flat, metal seal, ASA vacuum fittings. Includes adaptors, flanges, seals and clamps.
Traps
We have years of experience designing and building custom foreline traps to protect pumps and eliminate buildup of condensable by-products in forelines and exhaust lines. Examples of these include water-cooled and particle traps for LPCVD, PECVD, metal CVD, MOCVD and metal etch. Others are particle traps for crystal growers, liquid traps for reclamation of photo resist and oil reclamation traps for industrial applications. Often times our customers see a 200% increase in preventative maintenance intervals after installing one of these traps.
Thermal Products
The experience gained designing heaters for our standard products has allowed us to provide thermal products for special applications. We have drawn from a number of heating technologies (silicon, fiberglass, cartridge, strip, band, tubular and thick film) in order to provide the most cost-effective solutions. Examples include heated traps, internal heaters for vacuum chambers, gas delivery systems and ion pump heaters.
System Integration
On request, Nor-Cal can assemble an entire system including chamber, frame, pumps, gauges, valves, manipulators and other components to customer specifications. Our vacuum technicians can complete a thorough qualification of system performance, including time to base pressure and RGA scan, before the system is back filled with nitrogen and shipped to the customer.
Comprehensive Downstream Solutions
Our experience coupled with a broad product offering allows us to integrate components, providing comprehensive solutions to semiconductor fabs and equipment manufacturers. To improve overall system performance and achieve customer defined goals, a thorough evaluation of the system is conducted. A cost of ownership model can be provided showing payback as a result of increased tool utilization and decreased planned and unplanned maintenance costs.
   

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