Foreline Traps

Molecular Sieve Traps

Metal Sieve Traps

Particulate Traps

Liquid Nitrogen Traps

Water Cooled Traps

Oil Mist Eliminators

LPCVD-TEOS Single & Multi-Stage Traps

Traps are very important to increase preventative maintenance intervals to vacuum systems. Whether it is to remove water vapor, particulate, condensable gases that can damage mechanical vacuum pumps or prevent oil back-streaming, Nor-Cal can provide trapping solutions for most vacuum applications. Custom traps for all applications can be constructed in addition to our standard solutions. Standard finish is bead-blast. Electro-polish finish is also available. Flanges can be KF, NW, CF, ISO or ASA.

General Information

Determine which type of trap will work best for your application.

Charts-Graphs about each technology

Metal Sieve Traps are great for preventing back-streaming from moving from the pump back into the chamber

Molecular Sieve

Molecular Sieve zeolite filter charge prevents back-streaming into the chamber from the pump and keeps water vapor from entering the vacuum pump and contaminating the oil

Particulate Traps use polyester felt filter or woven fiberglass. These filters prevent particulate from entering the vacuum pump and contaminating the oil.

LPCVD Traps

LPCVD Traps are specialty traps for eliminating TEOS in semi-conductor processes.

Water cooled traps protect mechanical pumps and other downstream components from condensable process gasses and their by-products.

Liquid Nitrogen Traps are excellent at removing condensable gases before they enter the mechanical pump contaminating the oil. They also keep oil from back-streaming into the chamber.

Oil Mist Eliminators keeps oil mist from escaping the exhaust of the oil sealed mechanical vacuum pump.

Replacement Media, Filters, Charges, Hardware and Accessories for all Traps