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Vacuum Coating Systems- Denton Vacuum |
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Magnetron Sputtering |
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Magnetron sputtering is a powerful and flexible technique which can be used to coat virtually any part with a wide range of materials - any solid metal or alloy and a variety of compounds. Sputtering is the removal of atomised material from a solid due to energetic bombardment of its surface layers by ions or neutral particles. When power is supplied to the magnetron a negative voltage is applied to the target. The negative voltage attracts positive ions to the target at great speeds. When the positive ions hit the target an energy transfer occurs that propels target material atoms into the vacuum. These atoms can then move to the material to be coated and deposit. Denton has a number of vacuum coating systems that can be configured for magnetron sputtering applications. These range from the Discovery and Explorer R&D Platforms to the desk top vacuum coating systems such as the Desk and Desk Top Pro.
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 The
Explorer® series represents Denton's workhorse for
R&D Vacuum Coating. The Explorer® system can be adapted to different
size vacuum chambers and is very configurable for custom applications.
The Explorer® can be used for vacuum magnetron sputtering
applications .
System options include:
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Discovery® systems can process relatively large samples and achieve remarkable thickness uniformity using small sputtering sources. Discovery® systems all have multi-cathode capability and are available with a complete range of process capabilities (RF/DC/Pulse sputtering, co-sputtering, RF bias, three levels of heat up to 900 °C, load locks, and magazine cassette feeders) to support deposition on substrates up to 200 mm in diameter. Turbopump or cryopump systems are available. |
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 The
Denton Desk IV series is designed for microscopy and sample
preparation vacuum coatings .The
Desk IV is available in a simple mechanically pumped configuration for
sputtering of noble metals or carbon evaporation. The turbo pumped model
is available for ultra fine grain sample preparation. For larger
samples, Denton offers the Desk IV XLS. The Desk Iv has a color
touch-screen for easy operation.All systems include a gold or gold/palladium target (customer choice). Rotation, Tilt and Rotation and a Film Thickness Monitor are offered as optional accessories for all models.
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 The
Desktop Pro is designed to be a compact tool for R&D applications.
Capable of sputtering
dielectric and metal films with ease, the Desktop Pro can be outfitted
with up to two (2), 2.0” diameter magnetrons. The magnetrons are
inclined to a rotating substrate stage; an arrangement that yields
excellent film thickness uniformity (better than 5%) over the entire
diameter of the stage. The system can be outfitted with either an RF,
DC, or RF + DC power supply and optional magnetics to support the
sputtering of ferromagnetic materials are available. Power supply output
switching allows a user to power two cathodes sequentially from a single
power supply; a feature that can result in significant cost savings.
The Desktop Pro comes equipped with a 65 liter/sec turbopump and is controlled via a touch-screen monitor. |
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| All Denton Vacuum coating magnetron sputtering systems come equipped with magnetron sources from: | |
The
Denton Discovery®
is a complete turn-key vacuum coating system for magnetron sputtering.
The Denton Discovery®
was designed for pilot type R&D production. 