Schoonover, Inc. - Vacuum Equipment - Vacuum Coating Systems

Vacuum Coating Systems- Denton Vacuum

	Ion Beam Deposition Ion Beam Etch Reactive Ion Etch

Ion beam-assisted deposition is a process carried out under high vacuum in which a vapor-deposited coating is bombarded with energetic ions from an ion source. Mixing of atoms at the coating-substrate interface as a result of collisions with impinging ions leads to improved adhesion. The Denton Ion Beam system specializes in: � High density Films � Environmental stability � Stable deposition rates � Stoichiometry control Ion Beam Etch and Reactive Ion Etch can be equipped with DC or RF power supplies. The Denton Ion Beam Etch and Reactive IOn Etch is excellent for metal etch and dielectric applications.
The Denton Discovery� HDG is a complete turn-key vacuum coating system for Ion Beam Deposition, Ion Beam Etch and Reactive Ion Etch. The Denton Discovery� HDG can be equipped with a wide range of options including: - Ion Sources - Substrate Fixturing - End Point Control - RGA - Process Automation Process Pro� Software Option � Complete System Automation Package � Unattended tool operation � Recipe editing � Process analysis � Event tracking � Remote Operation � Report Generation Discovery� HDG Product Literature HDG Ion Source Selection Guide