Vacuum Coating Systems- Denton Vacuum

Electron Beam Deposition

Electron beam deposition involves the evaporation of material in a crucible by heating with an electron beam, which is generated from a hot filament and focused with a magnetic field. In the vacuum chamber, the evaporated material moves to the substrate, which can be protected by a mechanical shutter when the right amount of material has been deposited. The target substrate is heated to improve the quality.

Typical Vacuum Coating Processes Include:

• Optical Interference Coatings
• Medical Devices
• Telecommunications
• Anti-reflective optical coatings
• Materials Research
• Protective Coatings
• CD mastering

The Explorer® system can be adapted to different size vacuum chambers and is very configurable for custom applications. System options include:

      - Single and multi-pocket e-beam guns

      - Quartz crystal monitoring

      - Chamber Customization

      - Load Lock configuration

      - Glass bell jars

      - Built to fit your R&D vacuum coating system needs

 

Explorer® Product Literature