Schoonover, Inc. - Vacuum Equipment

Vacuum Equipment - Magnetron Sputtering

Magnetron Sputtering Equipment

Greater Control

All reputable manufacturers of magnetron sources use rare-earth permanent magnets to confine the plasma and direct the flow of atoms during the sputtering process. But that is where the similarity between their magnetrons and ours ends.
Because, to optimize performance for any application, you have to be able to control the shape of the magnetic field. And even the most carefully calculated placement of conventional magnets can't do that as well as the advanced new method we have developed and patented.

Products

Circular Magnetrons- Schoonover circular magnetron sources are available in 1", 2", 3", 4", 5", 6", 8", 10", 12", and 16" target sizes.

Rectangular Magnetrons- Schoonover rectangular cathodes are available in a full range of target widths from 1.5 to 12 inches - and in target lengths from 1 to 20 feet.

Our Technology

Profiled Magnets

Angstrom Sciences
Profiled Magnets

Other Magnetrons
Ordinary Magnets

[Click drawing to enlarge]

Simply put, we profile our magnets.

That is, we start with NdFeB magnets � which are 30% more powerful than other rare-earth magnets, so they have an exceptionally strong field to start with � then we grind them into contours which optimize the shape of the field they generate. That is critically important, because the shape of the magnetic field above the target determines everything from film uniformity and deposition rate to target utilization.

This approach allows us to use computer modeling to match your application with the magnetic profile that will work best for you. We can even custom-engineer magnets to meet your specific requirements.

(Some manufacturers have tried to achieve similar results by installing secondary magnets to alter the shape of the field. Unfortunately, that method not only costs more to manufacture, but provides less flexibility than profiled magnets. And it also generates stray field lines which reduce uniformity.)

Optimized Performance

The result is, you get exactly the kind of performance you need whether it is high uniformity and target utilization, high rate and throughput, or a perfect balance between the two. And you get that performance in a state-of-the-art device that provides many other exclusive advantages as well. Such as, the option of balanced or unbalanced magnetron fields.

	Balanced Magnetrons
	Balanced Magnetrons have a tightly confined magnetic field. So the magnetic lines of force remain close to the target surface and the plasma is strongly confined to this area. This allows the field to be more easily optimized for high target utilization or rate. And, since electrons and ions are less likely to strike the substrate, the substrate stays cooler.
	Unbalanced Magnetrons
	Unbalanced Magnetrons are characterized by a less tightly confined magnetic field, so the magnetic lines of force extend further out in the chamber. Electrons and ions are therefore less tightly bound to the target region, and electrons in particular can readily reach the substrate. The higher electron density near the substrate heats it to a higher temperature, and provides a mechanism for ionization; both of which can be important in the formation of special films.

More Efficient Cooling

Turbulent water flow is another advance we have pioneered, patented, and built into every one of our magnetrons.

It is superior to old-fashioned laminar water flow because it distributes cooling more evenly and efficiently across the cathode body. So it not only allows us to use the stronger NdFeB magnets we described above, it also helps minimize hot spots and eliminate both grain boundary dissociation and cracking of thermally sensitive materials.

Faster, Easier Target Change

Schoonover circular magnetrons also incorporate our patented threaded target clamping system, which helps minimize downtime by providing the fastest, easiest method available for changing targets. Plus, it adjusts for variable target thickness without extra tools or devices.

Stronger Magnetrons

Unlike most manufacturers, we machine each of our standard magnetrons out of solid blocks of 304 stainless steel and OFHC copper. So you can count on getting maximum magnetic integrity, encased in the most robust precision-fitted assembly you can buy.

More Comprehensive Service

Schoonover designs, engineers, and manufactures a complete line of sputtering sources for everything from research and development to full-scale production applications.