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| More Advanced, And More
Efficient |
| Angstrom Sciences circular magnetrons have
rapidly become recognized as the new standard of the
sputtering industry. Because in addition to their advanced
features such as profiled magnets, turbulent water flow, and
solid stainless steel construction - they offer a host of
other performance efficiencies as well. |
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| Versatile, Compact Design |
| Their ultra-compact design makes them ideal for
virtually any new or retrofit application - including the most
complex multiple-cathode deposition clusters or the smallest
vacuum chambers. And they can easily be configured for either
internal or external mounts. |
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| Total Power Compatibility |
| Their low-impedance heads provide RF, DC,
mid-frequency DC, pulsed DC, and microwave power compatibility. |
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| Standard Fittings |
| Angstrom Sciences uses ISO NW standard fittings,
as well as ConFlat® metal seal flanges. All utilities
are maintained at atmosphere, and are accessed through standard
"O"-ring compression fittings for ease of installation in any
vacuum system. |
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| Full Range Of Sizes |
| Angstrom Sciences circular magnetron sources are
available in 1", 2", 3", 4", 5", 6", 8", 10", 12", and 16"
target sizes. |
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| Quick, Easy Target Change |
| Our patented threaded clamp and anode shield
allow you to change targets (sizes 1" to 6") quickly and easily
without specialized tools, and their built-in adjustability lets
you fit targets of varying thickness without resorting to
spacing devices. |
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| Lower Pressure, Higher
Power |
| Our Magnetrons can operate at extremely low
pressure - down to the 10-4 Torr range - and our
directly cooled designs can deliver power densities up to 250
watts/in2 (39 watts/cm2). |
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| Higher Rates And
Performance |
| That means they can coat a greater area for
their cathode size than other magnetrons. So you can maximize
both your coating zone and your target utilization without the
kind of trade-off in rate that other magnetrons force you to
make. |
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| Greater Target Utilization |
| Yet these same advanced magnetrons can give you
target utilization as high as 50%. |
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| Greater Uniformity |
| And, thanks to our patented profiled magnets,
our magnetrons also deliver much greater uniformity of
deposition - routinely in the ±3-to-5% range. (One of our
research customers has even documented uniformity of ± .1% with
Angstrom Sciences magnetrons.) |
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| Anode Shields |
| The addition of an anode shield permits
operation at lower voltage and pressure, since the distance
between the cathode and anode (ground plane) is shorter. It also
prevents debris from falling in the space between the anode and
cathode, which would cause electrical short circuits and/or
arcs. The possibility of coating bolts or target clamps is
minimized, if not eliminated. Due to its' location however,
there is a possibility of material flaking off the anode shield
and causing a short circuit and/or contaminating the target. |
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| Total Commitment |
| At Angstrom Sciences, we design, engineer, and
manufacture our own complete line of magnetron sputtering
cathodes for thin film deposition. It's our core business, and
we're totally committed to making sure it's done right, every
step of the way. So, we can assure you of the quality and
reliability of every product you buy from us. And we stand ready
to provide you any help you may need in specification,
installation, start-up, and service. |
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| Guaranteed |
| All Angstrom Sciences magnetrons are guaranteed
against defects in workmanship and materials for two full years. |
