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RF Plasma Power Generators |
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Power Supplies
for Plasma Processes
RF Power Supply
RF Matching Network
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Advanced Energy manufactures
RF Power
Supplies for all power levels for solar, vacuum coating and
semiconductor applicarions. Advanced Energy manufactures RF Generators
optimizes film and throughput with unprecedented power accuracy.
Advanced Energy Line-Up of RF
Plasma Power Supplies |
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Paramount RF Power-Delivery Systems -
Paramount 3 Kw RF Power Supplies 13.56 fixed or variable into
a 50 Ω and non-50 Ω loads. The Paramount enables the next
generation of etch and deposition processes with faster process
transitions. Your generator to maximize yield and ROI.
Paramount RF
Power-Delivery Systems Product Information |
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 Apex
RF Power-Delivery Systems
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The Apex Series RF Plasma Generators provides a
modular design utilizing a suitable chamber mounting capability. The
Apex Series provides sophisticated RF-Conversion Technology to offer
enhanced product and process reliability.
Apex RF
Power-Delivery Systems Product Information |
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 HFV Variable
Frequency (~2 MHz) Generators
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The HPV Variable Frequency RF Power Generator is
mainly used for 200mm and 300mm wafer processing for flat panel display.
This versatile power generators features include digitally synthesized
variable-frequency output and microprocessor control, with output power
levels of 5 and 8 kW. In addition, it delivers an output frequency range
of 1.765 to 2.165 MHz.
HFV Variable
Frequency (~2 MHz) Generators Product Information
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 CESAR
RF Power Supplies -
Cesar RF is a versatile RF Generator consistent RF
power-delivery performance, as well as a diverse selection of models,
each with a unique set of features and capabilities (2, 4, 13.56, 27.12,
and 40.68 MHz; 0.3 to 5 kW; with a variety of user interfaces and input
options).
CESAR RF
Power Supplies Product Information
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 HiLight
RF Generators
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Compact, lightweight and air-cooled, the 13.56MHz,
600 W HiLight Plasma Generator is the robust choice for low power
on-board applications. HiLight Generators are CE compliant and
controlled via a 25 pin user port.
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 Integro
RF Generators -
The Integro is the economical choice that combines
a 13.56MHz 600W Plasma Generator with an auto matching network in a
single compact package.
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 Ovation
VHF Power-Delivery Systems
-The Ovation
fully-integrated, power delivery system enables faster, higher-precision
processes, such as those required for demanding narrow-linewidth,
dielectric etch processes, through the implementation of a unique power
delivery scheme. It is the first to accurately deliver power into a
non-50-ohm environment without an external sensor, reacting faster than
traditional power supplies.
Ovation
VHF Power-Delivery Systems Product Information |
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 Navigator
Digital Matching Network
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The Navigator Digital Matching Network provides reliable matching over
load impedances of 15W to 30kW. Equipped with microprocessor-controlled
stepper motor circuitry and digital, user-selectable tuning algorithms,
it provides greater consistency and accuracy than traditional
analog-based tuning methods. This enables it to optimize delivered
process power to semiconductor, solar, FPD, and MEMs manufacturing
processes, including etch, CVD, HDP-CVD, PVD, and chamber clean
applications.
Navigator
Digital Matching Network Product Information |
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 VarioMatch
Automatic Matching Networks
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VarioMatch's high tuning accuracy and speed enable consistant power
across a wide range of plasma load conditions (600 W to 5 kW, 2 to 40.68
MHz). VarioMatch Networks are easy to operate and integrate with any
existing system. |
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RF Cables and Accessories-
More Information on RF Cable Options |
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