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Vacuum Coating & Deposition - DC Power Supplies - RF Power Supplies for Semiconductor, Solar & Vacuum Coating


Advanced Energy

Power Supplies for Plasma Processes
DC Power Supply
DC Pulsed Power
RF Power Supply
RF Match Networks

Advanced Energy manufactures power supplies, thermal products and Aera Mass Flow Controllers for high tech industries such as solar panel manufacturing and semiconductor processing. RF & DC Plasma Sources are also used in the vacuum coating processes such as architectural glass, thin film deposition and flat panel displays. AE Power Supplies are unrivaled in the production of RF & DC Plasma and specialize in
  • Plasma Control
  • Unmatched Arc Handling Capability
  • Cutting Edge Match Technology
  • Leading Solutions to Complex Vacuum Deposition Processes

Advanced Energy designs specialized power supplies for applications such as:

  • RF cleaning 
  • Metal and dielectric etching 
  • Photoresist ashing 
  • Chemical vapor deposition (CVD) 
  • Plasma-enhanced chemical vapor deposition (PECVD) 
  • Physical vapor deposition (PVD) 
  • Sputter deposition

In addition, we supply DC sputtering (reactive and metallic), AC dual-cathode sputtering, and PECVD and units for ion beam deposition, reactive ion beam etch (RIBE), and leading-edge plasma instrumentation applications.

 

Selection Chart for Sputtering Plasma Generators - DC , DC-Pulsed, AC, & RF Generators

Advanced Energy Power Generators

Power Systems-Direct Current        

Pinnacle® Series - Range 3-200kw Air Cooled

Pinnacle® Diamond- Range 8-15kw Water Cooled

MDX Series - 500W-1.5kw

Pinnacle® Plus+ Pulsed-DC - Pinnacle with Internal Power Pulsing

Pinnacle® 3000 - High Efficiency 3000 W

Power Systems-Low to Mid-Frequency

PEII Low-Frequentcy Series - 40 kHz Pulse Width to 40 kW

PDX®  Mid-Frequency Power Systems  - Range 1250-8000kw

LFGS RF Generators - Variable Frequency 1250W - 40-500 kHz

Crystal® - Resonant-circuit power supply 60, 120 and 180 kW
 

Power Systems-RF 13.56KHz

Paramount® RF Power-Delivery Systems-Half Rack 3 kW

Apex® RF Power-Delivery Systems- Modular Design Chamber Mounting

HFV® Variable Frequency (~2 MHz) Generators -5 & 8kW Output

CESAR® RF Power Supplies -2-40.68 MHz, 0.3-5kW

HiLight™ RF Generators - Compact, Light & Air Cooled

Integro™ RF Generators - 600W RF with Vario Match

Ovation VHF Power-Delivery Systems - Faster High Precision Processes

Navigator® Digital Matching Network - Wide Range of load impedances-15 W to 30 kW

VarioMatch™ Automatic Matching Networks - Wide Range of Plasma Load Conditons
 


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