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Power Systems-RF 13.56KHz

Paramount� RF
Power-Delivery Systems-Half
Rack 3 kW
Apex� RF
Power-Delivery Systems-
Modular Design Chamber Mounting
HFV� Variable
Frequency (~2 MHz) Generators -5
& 8kW Output
CESAR� RF Power
Supplies -2-40.68 MHz, 0.3-5kW
HiLight�
RF Generators -
Compact, Light & Air Cooled
Integro� RF Generators
- 600W RF with
Vario Match
Ovation� VHF
Power-Delivery Systems -
Faster High Precision Processes
Navigator� Digital
Matching Network -
Wide Range of load impedances-15 W to 30 kW
VarioMatch� Automatic
Matching Networks -
Wide Range of Plasma Load Conditons
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