Schoonover, Inc. - Vacuum Equipment

DC Power Supplies - RF Power Plasma Generators


	Power Supplies for Plasma Processes DC Power Supply DC Pulsed Power RF Power Supply RF Match Networks

Advanced Energy manufactures power supplies, thermal products and Aera Mass Flow Controllers for high tech industries such as solar panel manufacturing and semiconductor processing. RF & DC Plasma Sources are also used in the vacuum coating processes such as architectural glass, thin film deposition and flat panel displays. AE Power Supplies are unrivaled in the production of RF & DC Plasma and specialize in Plasma Control Unmatched Arc Handling Capability Cutting Edge Match Technology Leading Solutions to Complex Vacuum Deposition Processes Advanced Energy designs specialized power supplies for applications such as: RF cleaning Metal and dielectric etching Photoresist ashing Chemical vapor deposition (CVD) Plasma-enhanced chemical vapor deposition (PECVD) Physical vapor deposition (PVD) Sputter deposition In addition, we supply DC sputtering (reactive and metallic), AC dual-cathode sputtering, and PECVD and units for ion beam deposition, reactive ion beam etch (RIBE), and leading-edge plasma instrumentation applications.
Selection Chart for Sputtering Plasma Generators - DC , DC-Pulsed, AC, & RF Generators

Advanced Energy Power Generators Power Systems-Direct Current Pinnacle Series - Range 3-200kw Air Cooled Pinnacle Diamond- Range 8-15kw Water Cooled MDX Series - 500W-1.5kw Pinnacle Plus+ Pulsed-DC - Pinnacle with Internal Power Pulsing Pinnacle 3000 - High Efficiency 3000 W

Power Systems-Low to Mid-Frequency PEII Low-Frequentcy Series - 40 kHz Pulse Width to 40 kW PDX Mid-Frequency Power Systems - Range 1250-8000kw LFGS RF Generators - Variable Frequency 1250W - 40-500 kHz Crystal - Resonant-circuit power supply 60, 120 and 180 kW

Power Systems-RF 13.56KHz Paramount RF Power-Delivery Systems-Half Rack 3 kW Apex RF Power-Delivery Systems- Modular Design Chamber Mounting HFV Variable Frequency (~2 MHz) Generators -5 & 8kW Output CESAR RF Power Supplies -2-40.68 MHz, 0.3-5kW HiLight RF Generators - Compact, Light & Air Cooled Integro RF Generators - 600W RF with Vario Match Ovation VHF Power-Delivery Systems - Faster High Precision Processes Navigator Digital Matching Network-Wide Range impedances-15W to30 kW VarioMatch Automatic Matching Networks-Wide Range Plasma Load Condition