Telemark E-Beam Depostion Sources

Telemark E-Beam Deposition Sources

E-Beam Sources

Telemark Electron Beam (also referred to as e-beam deposition) Equipment for optical coating and other vacuum deposition processes. Telemark provides a full range of electron beam power supplies, sweeps and e-beam guns. Telemark E-Beam Guns or Sources provides a number of important benefits:

270 degree Beam deflection (Hidden Filament)
Proprietary water cooling design for longer crucible life and consistent evaporation of material
Permanent magnet for primary beam positioning for better evaporation process control
Plug-in emitter for easy filament replacement
Side or bottom crucible rotation drive
Most components are maintained in stock
1-2 week source delivery

Telemark Product Literature- E-Beam Sources

UHV E-Beam Sources

Specifications for Single and Multi-Pocket Guns

		Model 265/266/270**
	Model 211/241/247	Model 271/272/277**	Model 295
E-Beam Defection	270�	270�	270�
Power Rating	6 kW*	10 kW*	10 kW* /15 kW*
Maximum High Voltage	-10 kV	-10 kV	-10 kV
High Voltage Range	-6 kV to -10 kV	-6 kV to -10 kV	-6 kV to -10 kV
Lateral Coil Resistance	8.5 ohms	3.0 ohms	3.0 ohms
Long. Coil Resistance	7.5 ohms	9.6 ohms	9.6 ohms
Filament Power	600 watts maximum	600 watts maximum	900 watts maximum
Water Requirements	2 gpm (min.) at 60�F	3 gpm (min.) at 60�F	5 gpm (min.) at 60�F

Multi-Pocket Model Numbers-Description of Guns including # of pocket and size

241	247	265/266		270/271/277		295		# of Pockets	Pocket Size
Side	Bottom	Side	Bottom	Side	Bottom	Side	Bottom	# of Pockets	Pocket Size
-	-	-19	-20	-	-	-	-	3	2 x 25cc/Banana
-01	-44	-43	-44	-	-	-	-	4	4cc
-02	-47	-29	-28	-29	-28	-	-	4	7cc
-	-	-01	-02	-01	-02	-	-	4	15cc
-	-	-07	-08	-07	-08	-	-	4	25cc
-	-	-	-	-19	-20	-	-	4	30cc (With Web)
-	-	-	-	-45	-44	-	-	4	40cc
-	-	-	-	-37	-36	-	-	4	2-15cc/2-25cc
-04	-63	-	-	-	-	-	-	Pan	63cc
-	-	-15	-16	-	-	-	-	Trough	190cc
-	-	-	-	-31	-30	-	-	Trough	235cc
-	-	-	-	270-79	270-80	-	-	Trough	383cc
-	-	-	-	-	-	-91	-92	Trough	1486cc (10kW*)
-03	-64	-09	-10	-	-	-	-	6	4cc
-	-	-05	-06	-05	-06	-	-	6	7cc
-	-	-11	-12	-11	-12	-	-	6	15cc
-	-	-	-	-27	-18	-	-	6	25cc
-	-	-	-	-39	-38	-	-	6	3-15cc/3-25cc
-	-	-	-	270-69	270-70	-	-	6	40cc
-	-	-	-	-	-	-51	-52	6	6x100cc (10kW*)
-	-	-	-	-	-	-01	-02	6	6x100cc (15kW*)
-	-	-13	-14	-13	-14	-	-	8	7cc
-	-	-	-	-35	-34	-	-	8	12cc
-	-	-	-	-	-	-71	-72	10	40cc (10kW*)

Normal value: actual power rating may vary, depending on customer's process.

Single Pocket & UHV Designs

Standard E-Beam Source		UHV E-Beam Source		Size
Model 211	Model 272	Model 218	Model 258	Size
211-05		218-05		1.5cc
211-04		218-04		4cc
211-07	272-01	218-07	258-01	7cc
211-12	272-12	218-12	258-12	12cc
211-15	272-02	218-15	258-02	15cc
	272-03		258-03	25cc
	272-30		258-30	30cc
	272-04		258-04	40cc
	272-05		258-05	100cc

Special Application Sources

Crucible-less design for customers who want to supply the crucible as part of their mechanical assembly. The Model 293 Crucible-less Source offers a compact cost-effective solution. This source is a 15 Kw source and can be supplied with arc supression.

The Model 294 Straight Shooter Design offers a 12 Kw design in crucible sizes of 6 x 40cc or a 440cc trough. The addition of Arc-Supression option, makes this an ideal choice for ion assisted optical coating processes.

Arc-Supression option is ideal for many applications, such as for optica coating and for ion plating without a pressure barrier. Arc-Supression s available on most all Telemark production sources. It has a footprint similar to standard sources but with the high voltage feedthroughs incorporated into the source. Two separate cooling lines are required to cool the source body and the high voltage assembly.

The Self-Sealing Cover Plate Option is available for applications where cross-contamination between materials is a concern. The front of the cover plate moves up as the crucible indexes to the next pocket.

The Model 379 Crucible Indexer provides either manual or PLC control of a 4 or 6 pocket E-Beam Source, plus continuous or retrograde (banana pocket) speed control. The Model 395 provides control of 8, 10, or 12 pocket control plus continuous or retrograde motion.