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The Apex Mass Flow Controllers and
Apex Mass Flow Meters are designed to be used in vacuum
systems where precise gas flow is required. Applications
include, vacuum coating, CVD Processes, PVD Processes, e-beam
thin film deposition, sputtering, vacuum sputtering,
thin film sputtering, thermal evaporation. Also thin
film, optical coating, cathodic arc sputtering and
magnetron sputtering.
Apex Vacuum Mass Flow Controllers
and Mass Flow Meters are also used in pressure control
and vacuum pressure control processes. The Apex Mass
Flow Controller outputs and inputs allow the user to
replace other mass flow controllers and mass flow meters
such as MKS, Brooks, Celerity, Unit, Sierra and Hastings
Also can be used in leak detection
systems for mass flow leak detection systems and with a
pressure controller Pressure Decay Leak Detection
Systems.
Try Apex Vacuum today in vacuum
coating applications.
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