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Apex Vacuum Pressure Controllers- Upstream Pressure Control of Vacuum Systems



Upstream Pressure Control For Vacuum   

 

Apex Vacuum Pressure Controllers for vacuum processed, provide pinpoint control for vacuum ranges from high vacuum to 760 torr(1 atm). With update times of 100 milliseconds, the Apex Vacuum Pressure Controller responds quickly to provide smooth pressure steps needed in critical processes.

 

Apex Pressure Control Models

 

 

Rough Vacuum 1 atmosphere(760 torr) to 8 torr

 

 

 

 

Pressure Controller- 760 torr to 8 torr

 

In the single valve unit, one side is connected to vacuum source with the other side connected to the gas supply.

 

 

 

 

 

 

 

 

 

 

Dual Valve Pressure Controller 760 torr to 8 Torr

 

In a dual valve pressure controller on side can the connected the vacuum pump with other side to atmosphere. Sensing port is connected to the vacuum vessel. The PID in the Dual Valve Controller opens each valve in sequence to hold the pressure steady.

 

 

 

 

 

Pressure Control System to the Millitorr Range

 

 

 

Pressure Control for the Millitorr Range

 

For Vacuum Pressure Control to the low millitorr range, the Apex Vacuum Pressure Controller uses the signal from the Capacitance Vacuum Gauge (10,20 100,200,1000 torr full scale models)

 

 

 

 

 

 

 

 

High Vacuum Pressure Control

 

High Vacuum Pressure Control

 

 

 

Apex Pressure Control for high vacuum uses a hot cathode vacuum gauge signaling the Apex Pressure  PID Controller to increase/decrease the flow into the vacuum chamber.

 

 

 

 

 

 

 

 

 

BB9 Communications Box
for Multiple Apex Devices

 

The Apex Vacuum Pressure Controllers can be used in conjunction with the Apex Mass Flow Controllers and Meters. Communication input/output can be user specified with the choices being 0-5V, 0-10V, or RS-232(provided on all Pressure Controllers). The BB9 Communications Box allows other Apex Vacuum Devices such as Apex Mass Flow Controllers to be used in conjunction with Apex Pressure Controllers.

 

FlowVisionSC software can be used to control Apex Devices with computer control communications.

 

 

 

 


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