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Upstream Pressure Control
For Vacuum
Apex Vacuum Pressure Controllers for
vacuum processed, provide pinpoint control for vacuum ranges
from high vacuum to 760 torr(1 atm). With update times of
100 milliseconds, the Apex Vacuum Pressure Controller
responds quickly to provide smooth pressure steps needed in
critical processes.
Apex
Pressure Control Models
Rough Vacuum 1
atmosphere(760 torr) to 8 torr
Pressure Controller- 760 torr to 8 torr
In the single valve unit, one side is
connected to vacuum source with the other side connected to
the gas supply.
 Dual Valve Pressure Controller 760 torr
to 8 Torr
In a dual valve pressure controller on
side can the connected the vacuum pump with other side to
atmosphere. Sensing port is connected to the vacuum vessel.
The PID in the Dual Valve Controller opens each valve in
sequence to hold the pressure steady.
Pressure Control
System to the Millitorr Range
Pressure Control for the Millitorr Range
For Vacuum Pressure Control to the low millitorr range, the
Apex Vacuum Pressure Controller uses the signal from the
Capacitance Vacuum Gauge (10,20 100,200,1000 torr full scale
models)
High
Vacuum Pressure Control
High Vacuum Pressure Control
Apex Pressure Control for high vacuum uses a hot cathode
vacuum gauge signaling the Apex Pressure PID
Controller to increase/decrease the flow into the vacuum
chamber.
BB9 Communications Box
for Multiple Apex Devices
The Apex Vacuum Pressure Controllers
can be used in conjunction with the Apex Mass Flow
Controllers and Meters. Communication input/output can be
user specified with the choices being 0-5V, 0-10V, or
RS-232(provided on all Pressure Controllers). The BB9
Communications Box allows other Apex Vacuum Devices such as
Apex Mass Flow Controllers to be used in conjunction with
Apex Pressure Controllers.
FlowVisionSC software can be used to
control Apex Devices with computer control communications.
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