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Upstream Pressure Control
For Vacuum
The Apex Vacuum Pressure Controller for high vacuum uses the
analog output signal from a vacuum gauge controller or PLC
to control the vacuum pressure in a high vacuum chamber
system. With hundreds of updates per second, the Apex
Pressure Controller uses a precise PID loop to open/close
the valve on the controller to set the input pressure. The
Apex Pressure Controller comes in 0-5V, 0-10V and RS232
versions.
The Apex Pressure Controller can be used with any gauge
controller with an analog output. Most high vacuum gauges
use log-linear outputs, thus the need for the gauge
controller or PLC.
The pressure control loop is able to be changed on the
display. Thus it can be tuned to handle pressure control
steps that meet your process application.
High
Vacuum Pressure Control
High Vacuum Pressure Control
Apex Pressure Control for high vacuum uses a hot cathode
vacuum gauge signaling the Apex Pressure PID
Controller to increase/decrease the flow into the vacuum
chamber.
Apex High Vacuum Pressure Controller Product Specifications
& Information
Apex Pressure Control Manual
Options for Apex APC Pressure Controllers
Power Cables- Communication Cables
Control Software- LabView Drivers
BB9 Communications Box
for Multiple Apex Devices
The Apex Vacuum Pressure Controllers
can be used in conjunction with the Apex Mass Flow
Controllers and Meters. Communication input/output can be
user specified with the choices being 0-5V, 0-10V, or
RS-232(provided on all Pressure Controllers). The BB9
Communications Box allows other Apex Vacuum Devices such as
Apex Mass Flow Controllers to be used in conjunction with
Apex Pressure Controllers.
FlowVisionSC software can be used to
control Apex Devices with computer control communications.
The 4 torr to 760 torr version uses an
on-board sensor, while the Apex VPC uses a capacitance
diaphragm gauge on the vacuum system to sense pressure. The
Apex APC can be used with many CDG's. Standard models use a
10 torr, 20 torr, 100 torr, 200 torr, or 1000 torr model CDG.
The Apex Vacuum Pressure Controller has
a user display to change gases, set the pressure and display
readings. The RS 232 interface allows control of 26
individual controllers or meters off one computer RS 232
port.
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