|
Pressure Control For
Vacuum
Apex Vacuum Pressure Controllers for
vacuum processed, provide pinpoint control for vacuum ranges
from 1 millitorr to 760 torr(1 atm). With update times of
100 milliseconds, the Apex Vacuum Pressure Controller
responds quickly to provide smooth pressure steps needed in
critical processes.
The Apex Vacuum Pressure Controllers
can be used in conjunction with the Apex Mass Flow
Controllers and Meters. Communication input/output can be
user specified with the choices being 0-5V, 0-10V, or
RS-232(provided on all Pressure Controllers). No control box
is needed for providing power to the unit, just the PVPS24U
Universal Power Supply. The on-board display buttons can
also be used to set the control pressures.
The Apex Vacuum Pressure Controller for the millitorr range
uses a capacitance diaphragm gauge as the sensor reading
pressure. This linear output gauge sends an analog or
digital signal to the Apex Pressure Controller for precise
gas control to the vacuum system. The PID loop in the Apex
Pressure Controller smoothly controls pressure with updates
hundreds of times per second.
The Apex Vacuum Pressure Controller has
a user display to change gases, set the pressure and display
readings. The RS 232 interface allows control of 26
individual controllers or meters off one computer RS 232
port.
|
