Apex Mass Flow Meters

Apex Mass Flow Meter

Can Your Mass Flow Meter Measure 30 different gases? We Can!

Apex Mass Flow Meters for vacuum and non-vacuum applications combine flexibility with great accuracy.

Flexibility to choose from a list of 30 on-board gases, to choose your input and output voltage and the ability to use RS232 communications.

The ability to control up to 26 Apex devices through one RS232 port, provides your set-up the ultimate in flexibility.

Applications Include:

Vacuum evaporative coating
Vacuum Sputtering
Ion-Beam Deposition
E-Beam Coating Systems
High Temperature Furnaces- Gas Control
Research Applications

Apex Mass Flow Meter with TFT Screen Apex Display

Apex MFM with TFT Screen Option

Good for low light or when viewing is at an angle

One Instrument- Accurate..Repeatable for 30 On-Board Gases

30 factory installed, user selectable, calibrations:
                           • Air
                            • Argon
                            • Methane
                           • Carbon Monoxide
                            • Carbon Dioxide
                           • Ethane
                            • Hydrogen
                           • Helium
                            • Nitrogen
                            • Nitrous Oxide
                            • Neon
                           • Oxygen
                           • Propane
                           • Butane
                            • Acetylene
                            • Ethylene
                            • Iso-Butane
                            • Krypton
                            • Xenon
                            • Sulfur Hexaflouride
                           • 75% Argon + 25% C02
                            • 90% Argon + 10% C02
                           • 92% Argon + 8% C02
                            • 98% Argon + 2% C02
                            • 75% Argon + 25% Helium
                            • 75% Helium + 25% Argon
                            • 75% CO2 + 25% Argon
                           • Helistar® A1025
                            • Stargon® CS

What makes us different?

· 30 user selectable gases

· Fast 10 millisecond response

· Addressable RS-232 Digital Control Capability

· Fully functionable computer software available

· Pinpoint accuracy of 0.2% full scale plus 0.8% direct reading

· High Accuracy Calibration(some models) of 0.2% full scale/0.4% reading

· 100 to 1 turndown ratio from full scale flow

· Full scale flow range as low as 0.5 sccm full scale

· Lower Cost with more features and options

For models and online pricing:

Apex Mass Flow Meters

Other Information:

Apex Mass Flow Meters- Product Literature

Apex Mass Flow Controller Manual

Apex Mass Flow Meter Basic Specifications

Options for Mass Flow Meters

Power Cables- Communication Cables

Control Software- LabView Drivers

Application Example using Multiple Apex Devices

Apex Mass Flow Product Information Video

Gas Change Capabilty

Need More Reasons to Choose ?

Using the Apex Vacuum Products in a research laboratory

The Apex Mass Flow Controller, Mass Flow Meter and Pressure Controllers are uniquely suited for use in a research laboratory. All Apex products can be powered through a CD type plug into a 120V outlet. Thus no expensive power supplies are needed. This simplifies the laboratory set-up.

Up to 26 Apex Mass Flow Controllers or Mass Flow Meters can be controlled with FlowVision software through one addressable RS 232 port. The 30 onboard gases can be changed also through this software. So imagine a bank of mass flow controllers with the ability to change gases and fully control any one. Then imagine all mass flow controllers powered by one source plugged into a wall outlet. This is a reality with Apex. Have the ultimate in flexibility and save a lot of bucks! Not only that, you get better accuracy than other competitive products and great repeatability.

There are 22,000 devices in the field with this design with an unusual lifetime warranty.

The Apex Mass Flow Controllers and Apex Mass Flow Meters are designed to be used in vacuum systems where precise gas flow is required. Applications include, vacuum coating, CVD Processes, PVD Processes, e-beam thin film deposition, sputtering, vacuum sputtering, thin film sputtering, thermal evaporation. Also thin film, optical coating, cathodic arc sputtering and magnetron sputtering.