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Apex Mass Flow Meters


 


Can Your Mass Flow Meter Control 30 different gases?    We Can!  

 

Apex Mass Flow  Meters for combine flexibility with great accuracy. Flexibility to choose from a list of 30 on-board gases, to choose your input and output voltage and the ability to use RS232 communications. The ability to control up to 26 Apex devices through one RS232 port, provides your set-up the ultimate in flexibility.

 

Accuracy of 0.2% full scale plus 0.8% of reading approaches the accuracy of a digital mass flow meter.

 

The convenience of an on-board controller and display provides readings without expensive read out boxes. Our simple and inexpensive power wall plug replaces any complex and expensive power supply box.

 

Flexibility, Accuracy and Less Costly make the choice easy. 

 

One Instrument…Accurate..Repeatable for 30 On-Board Gases

Text Box: 30 factory installed, user selectable, gas calibrations:
                            Air
                            Argon
                            Methane
                            Carbon Monoxide
                            Carbon Dioxide
                            Ethane
                            Hydrogen
                            Helium
                            Nitrogen
                            Nitrous Oxide
                            Neon
                            Oxygen
                            Propane
                            Butane
                            Acetylene
                            Ethylene
                            Iso-Butane
                            Krypton
                            Xenon
                            Sulfur Hexaflouride
                            75% Argon + 25% C02
                            90% Argon + 10% C02
                            92% Argon + 8% C02
                            98% Argon + 2% C02
                            75% Argon + 25% Helium
                            75% Helium + 25% Argon
                            75% CO2 + 25% Argon
                            Helistar® A1025
                            Stargon® CS

 

 

 

 

 

 

 

 

 

Text Box: What makes us different?
30 User Selectable Gases- More flexibility for the customer 
Fast Response- 10 millisecond   response
Addressable RS-232 Interface- Control 26    units with one RS-232 port 
 FlowVision Windows Software- Control any Mass Flow Meter through a computer and graph flow
 Pinpoint Accuracy- 0.2% Full Scale plus 0.8% Reading, provides excellent accuracy 
100-1 Turndown Ratio- Combined with the pinpoint accuracy allows for lower flow readings 
Flows as low as 0.5 sccm Full Scale 
 Lower Cost - More features but not more costly

 

 

 

 

 

For models and online pricing:

 

Apex Mass Flow Meters          0.5 sccm    1 sccm    2 sccm    5 sccm   10 sccm   20 sccm

                                                    50 sccm     100 sccm     200 sccm     500 sccm    1 slpm

                                                    2 slpm      5 slpm

 

Other Information:

 

Options for Mass Flow Meters

Power Cables- Communication Cables

Control Software- LabView Drivers

 

Apex Mass Flow Meters- Product Literature

 

Apex Mass Flow Meter Basic Specifications

Apex Mass Flow Meter Manual

Frequently Asked Questions

 

Application Example using Multiple Apex Devices

 

Apex Mass Flow Meters are in use all over the world in both Research and Industrial Applications. Both OEM equipment builders and some of the worlds finest reseachers can take advantage of the Apex Vacuum Mass Flow Controllers benefits and low price.

 

Applications Include:

  • Vacuum evaporative coating

  • Vacuum Sputtering

  • Ion-Beam Deposition

  • Other thin film vacuum coatings

  • High Temperature Furnaces- Gas Control

  • E-Beam Coating Systems

  • Hydrogen Fuel Cell Research

       

Need More Reasons to Choose ?

Using the Apex Vacuum Products in a research laboratory

The Apex Mass Flow Controller, Mass Flow Meter and Pressure Controllers are uniquely suited for use in a research laboratory. All Apex products can be powered through a CD type plug into a 120V outlet. Thus no expensive power supplies are needed. This simplifies the laboratory set-up.

Up to 26 Apex Mass Flow Controllers or Mass Flow Meters can be controlled with FlowVision software through one addressable RS 232 port. The 30 onboard gases can be changed also through this software. So imagine a bank of mass flow controllers with the ability to change gases and fully control any one. Then imagine all mass flow controllers powered by one source plugged into a wall outlet. This is a reality with Apex. Have the ultimate in flexibility and save a lot of bucks! Not only that, you get better accuracy than other competitive products and great repeatability.

There are 22,000 devices in the field with this design with an unusual lifetime warranty.

The Apex Mass Flow Controllers and Apex Mass Flow Meters are designed to be used in vacuum systems where precise gas flow is required. Applications include, vacuum coating, CVD Processes, PVD Processes, e-beam thin film deposition, sputtering, vacuum sputtering, thin film sputtering, thermal evaporation. Also thin film, optical coating, cathodic arc sputtering and magnetron sputtering.

Apex Vacuum Mass Flow Controllers and Mass Flow Meters are also used in pressure control and vacuum pressure control processes. The Apex Mass Flow Controller outputs and inputs allow the user to replace other mass flow controllers and mass flow meters such as MKS, Brooks, Celerity, Unit, Sierra and Hastings

 

Also can be used in leak detection systems for mass flow leak detection systems and with a pressure controller Pressure Decay Leak Detection Systems.

 

Try Apex Vacuum today in vacuum coating applications.


Apex Mass Flow Controllers

 




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Phone us at 770-479-7138
E-mail:  info@schoonoverinc.com

 

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