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For models and
online pricing:
Apex Mass Flow Meters
0.5
sccm
1
sccm
2
sccm
5
sccm
10 sccm
20 sccm
50
sccm
100 sccm
200 sccm
500 sccm
1
slpm
2
slpm
5
slpm
Other
Information:
Options for Mass Flow Meters
Power Cables- Communication Cables
Control Software- LabView
Drivers
Apex Mass Flow Meters -
Product Literature
Apex
Mass Flow Meter Basic Specifications
Apex Mass Flow Meter Manual
Frequently Asked Questions
Application Example using Multiple Apex Devices
Apex Mass Flow Meters are in use all over the world in both
Research and Industrial Applications. Both OEM equipment
builders and some of the worlds finest reseachers can take
advantage of the Apex Vacuum Mass Flow Controllers benefits
and low price.
Applications Include:
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Vacuum evaporative coating
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Vacuum Sputtering
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Ion-Beam Deposition
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Other thin film vacuum
coatings
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High Temperature Furnaces- Gas
Control
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E-Beam Coating Systems
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Hydrogen Fuel Cell Research

Need More Reasons to Choose
?
Using the Apex
Vacuum Products in a research laboratory
The Apex Mass Flow
Controller, Mass Flow Meter and Pressure Controllers are
uniquely suited for use in a research laboratory. All Apex
products can be powered through a CD type plug into a 120V
outlet. Thus no expensive power supplies are needed. This
simplifies the laboratory set-up.
Up to 26 Apex Mass Flow
Controllers or Mass Flow Meters can be controlled with
FlowVision software through one addressable RS 232 port. The
30 onboard gases can be changed also through this software.
So imagine a bank of mass flow controllers with the ability
to change gases and fully control any one. Then imagine all
mass flow controllers powered by one source plugged into a
wall outlet. This is a reality with Apex. Have the ultimate
in flexibility and save a lot of bucks! Not only that, you
get better accuracy than other competitive products and
great repeatability.
There are 22,000 devices in the field with
this design with an unusual lifetime warranty.
The Apex Mass Flow Controllers and
Apex Mass Flow Meters are designed to be used in vacuum
systems where precise gas flow is required. Applications
include, vacuum coating, CVD Processes, PVD Processes, e-beam
thin film deposition, sputtering, vacuum sputtering,
thin film sputtering, thermal evaporation. Also thin
film, optical coating, cathodic arc sputtering and
magnetron sputtering.
Apex Vacuum Mass Flow Controllers
and Mass Flow Meters are also used in pressure control
and vacuum pressure control processes. The Apex Mass
Flow Controller outputs and inputs allow the user to
replace other mass flow controllers and mass flow meters
such as MKS, Brooks, Celerity, Unit, Sierra and Hastings
Also can be used in leak detection
systems for mass flow leak detection systems and with a
pressure controller Pressure Decay Leak Detection
Systems.
Try Apex Vacuum today in vacuum
coating applications.
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