Mass Flow Meters- Mass Flow Controllers- Mass Flow Controller Options Available

Mass Flow Controllers, Mass Flow Meters and Pressure Sensors

There are accessories and options available for the Apex Mass Flow Meters and Apex Mass Flow Controllers. Below is a description of the accessory or option, typical applications and/or specific products the option or accessory will work with.

Totalizer- Each Apex Mass Flow Controller or Mass Flow Meter can be equipped with a totalizer. This device totals the amount of gas through the meter or controller displaying in 1 unit resolutions. There are a variety of resolutions available. The Totalizer function can be set to freeze, roll over to zero or roll over to zero with an error signal.

Battery Pack- All Apex Mass Flow Meters (not Mass Flow Controllers) can be equipped with a battery pack(9 Volt small battery needed) to run the Apex Mass Flow Meter. Each battery is good for up to 7 hours of operation. This enables the Mass Flow Meter to work normally. The RS-232 and 0-5Vdc signals are still available through the 8 pin mini-din style connector on top of the battery pack. This option is especially good for doing portable calibrations of other flow devices.

BB9 Box- The BB9 Box allows you to connect up to 9 Mass Flow Controllers or Mass Flow Meters to one RS-232 Port. Daisy chaining the BB9 boxes(up to 3 BB9's) will allow the user to access up to 26 Mass Flow Meters or Controllers to one RS 232 port. This BB9 works with the FlowVision software. 24V Power can also be supplied to the BB9 to power the flow devices.

Software- FlowVision software or Hyper-Terminal®(on most PC's) allows for full control of the Apex Mass Flow Controllers or Apex Mass Flow Meters through an RS-232 Port. Up to 26 Apex Flow Devices and be controlled with the software and the BB9 box above.It is possible to transfer text files to a variety of spreadsheet programs for data logging, graphs and analysis. There is no additional software required to use the RS-232 communication feature. No BB9 is needed for just one device.

The FlowVision software is recommended for end user applications needing data logging or remote controlling of the Mass Flow Controller or Mass Flow Meter.

Local Setpoint Module-  The local setpoint control module was designed to assist operators who could not access the mounted display. This option is also good for quick setting of the setpoint as there is a knob on the LSPM that turns to provide the setpoint. Each LSPM comes with a DC-62 Communications Cable to connect the LSPM to the Mass Flow COntroller.

Local Setpoint Module

Remote Digital Display- The Remote Digital Display is typically used where the user cannot see the display on the Mass Flow Meter or Mass Flow Controller itself but needs to read the display. It is provided with two female 8-pin mini din connectors that can pass through the input and output signals and power. All standard RDD's can be mounted and are provided with a DC-62 Communication Cable to the device.

The Apex Mass Flow Controllers and Apex Mass Flow Meters are designed to be used in vacuum systems where precise gas flow is required. Applications include, vacuum coating, CVD Processes, PVD Processes, e-beam thin film deposition, sputtering, vacuum sputtering, thin film sputtering, thermal evaporation. Also thin film, optical coating, cathodic arc sputtering and magnetron sputtering.

Apex Vacuum Mass Flow Controllers and Mass Flow Meters are also used in pressure control and vacuum pressure control processes. The Apex Mass Flow Controller outputs and inputs allow the user to replace other mass flow controllers and mass flow meters such as MKS, Brooks, Celerity, Unit, Sierra and Hastings

Also can be used in leak detection systems for mass flow leak detection systems and with a pressure controller Pressure Decay Leak Detection Systems.

Try Apex Vacuum today in vacuum coating applications.